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MEMS/NEMS Sensors: Fabrication and Application av Koley, Goutam, Jahangir, Ifat
Utgiven 2021Hämta fulltext
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Relaterade ämnen
3D simulation
Accelerometer readout
AlGaN/GaN circular HFETs
GaAs MMIC
GaN diaphragm
MEMS
MEMS (micro-electro-mechanical system)
T1-995
TA1-2040
acceleration switch
accelerometer
accelerometer design
adaptive control
analytical model
anisotropy
back cavity
backstepping approach
bonding strength
deflection position detector
dual-mass MEMS gyroscope
electrostatic force feedback
femtosecond laser
floating slug
frequency mismatch
frequency split
frequency tuning
gas sensor
glass welding
high temperature pressure sensors
inertial switch