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Chapter Spatial Atomic Layer Deposition Por Jiménez, Carmen, Bellet, Daniel, Masse de la Huerta, César, Muñoz-Rojas, David, Huong Nguyen, Viet
Publicado em 2021Obter o texto integral
Online
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Assuntos relacionados
chemical vapor deposition, spatial atomic layer deposition (SALD), atmospheric pressure, in-line processing, thin films, transparent conductive materials, fluid dynamics
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