Lithography
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion o...
-д хадгалсан:
| Формат: | Online |
|---|---|
| Хэл сонгох: | англи |
| Хэвлэсэн: |
IntechOpen
2023
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| Нөхцлүүд: | |
| Онлайн хандалт: | ONIX_20231201_9789533070643_14 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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| _version_ | 1869526629058871296 |
|---|---|
| collection | Directory of Open Access Books |
| description | Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book. |
| format | Online |
| id | doab-20.500.12854ir-128908 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2023 |
| publishDateRange | 2023 |
| publishDateSort | 2023 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-1289082024-04-11T15:10:51Z Lithography Wang, Michael Biotechnology thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TD Industrial chemistry and manufacturing technologies::TDC Industrial chemistry and chemical engineering Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book. 2023-12-01T14:07:11Z 2023-12-01T14:07:11Z 2010 book ONIX_20231201_9789533070643_14 9789533070643 9789535145615 https://directory.doabooks.org/handle/20.500.12854/128908 eng image/jpeg n/a https://www.intechopen.com/books/3195 https://mts.intechopen.com/storage/books/3195/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/45639 10.5772/45639 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789533070643 9789535145615 IntechOpen 678 open access |
| spellingShingle | Biotechnology thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TD Industrial chemistry and manufacturing technologies::TDC Industrial chemistry and chemical engineering Lithography |
| title | Lithography |
| title_full | Lithography |
| title_fullStr | Lithography |
| title_full_unstemmed | Lithography |
| title_short | Lithography |
| title_sort | lithography |
| topic | Biotechnology thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TD Industrial chemistry and manufacturing technologies::TDC Industrial chemistry and chemical engineering |
| topic_facet | Biotechnology thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TD Industrial chemistry and manufacturing technologies::TDC Industrial chemistry and chemical engineering |
| url | ONIX_20231201_9789533070643_14 |