Scanning Electron Microscopy
Today, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging b...
保存先:
| フォーマット: | Online |
|---|---|
| 言語: | 英語 |
| 出版事項: |
IntechOpen
2023
|
| 主題: | |
| オンライン･アクセス: | ONIX_20231201_9789535100928_252 |
| タグ: |
タグなし, このレコードへの初めてのタグを付けませんか!
|
| _version_ | 1869526233993183232 |
|---|---|
| collection | Directory of Open Access Books |
| description | Today, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging but quantitative measurement of object topologies, local electrophysical characteristics of semiconductor structures and performing elemental analysis. Moreover, a fine focused e-beam is widely used for the creation of micro and nanostructures. The book’s approach covers both theoretical and practical issues related to scanning electron microscopy. The book has 41 chapters, divided into six sections: Instrumentation, Methodology, Biology, Medicine, Material Science, Nanostructured Materials for Electronic Industry, Thin Films, Membranes, Ceramic, Geoscience, and Mineralogy. Each chapter, written by different authors, is a complete work which presupposes that readers have some background knowledge on the subject. |
| format | Online |
| id | doab-20.500.12854ir-129145 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2023 |
| publishDateRange | 2023 |
| publishDateSort | 2023 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-1291452024-04-05T12:37:01Z Scanning Electron Microscopy Kazmiruk, Viacheslav Optical physics thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics::PHJL Laser physics Today, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging but quantitative measurement of object topologies, local electrophysical characteristics of semiconductor structures and performing elemental analysis. Moreover, a fine focused e-beam is widely used for the creation of micro and nanostructures. The book’s approach covers both theoretical and practical issues related to scanning electron microscopy. The book has 41 chapters, divided into six sections: Instrumentation, Methodology, Biology, Medicine, Material Science, Nanostructured Materials for Electronic Industry, Thin Films, Membranes, Ceramic, Geoscience, and Mineralogy. Each chapter, written by different authors, is a complete work which presupposes that readers have some background knowledge on the subject. 2023-12-01T14:55:24Z 2023-12-01T14:55:24Z 2012 book ONIX_20231201_9789535100928_252 9789535100928 9789535143291 https://directory.doabooks.org/handle/20.500.12854/129145 eng image/jpeg n/a https://www.intechopen.com/books/1505 https://mts.intechopen.com/storage/books/1505/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/1973 10.5772/1973 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789535100928 9789535143291 IntechOpen 844 open access |
| spellingShingle | Optical physics thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics::PHJL Laser physics Scanning Electron Microscopy |
| title | Scanning Electron Microscopy |
| title_full | Scanning Electron Microscopy |
| title_fullStr | Scanning Electron Microscopy |
| title_full_unstemmed | Scanning Electron Microscopy |
| title_short | Scanning Electron Microscopy |
| title_sort | scanning electron microscopy |
| topic | Optical physics thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics::PHJL Laser physics |
| topic_facet | Optical physics thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics::PHJL Laser physics |
| url | ONIX_20231201_9789535100928_252 |