Chemical Vapor Deposition
This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have e...
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| Formato: | Online |
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| Idioma: | inglês |
| Publicado em: |
IntechOpen
2023
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| Acesso em linha: | ONIX_20231201_9789535125730_552 |
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| _version_ | 1869515910842155008 |
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| collection | Directory of Open Access Books |
| description | This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have emerged in the past, and thus the scope of this book goes beyond providing fundamentals of the CVD process. Some of the chapters included highlight current limitations in the CVD methods and offer alternatives in developing coatings through overcoming these limitations. |
| format | Online |
| id | doab-20.500.12854ir-129443 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2023 |
| publishDateRange | 2023 |
| publishDateSort | 2023 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-1294432024-04-05T12:31:23Z Chemical Vapor Deposition Neralla, Sudheer thin films, chemical vapour deposition, carbon nanotubes, polymers, composite, photoluminescence thema EDItEUR::P Mathematics and Science::PN Chemistry::PNR Physical chemistry::PNRS Solid state chemistry This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have emerged in the past, and thus the scope of this book goes beyond providing fundamentals of the CVD process. Some of the chapters included highlight current limitations in the CVD methods and offer alternatives in developing coatings through overcoming these limitations. 2023-12-01T15:26:06Z 2023-12-01T15:26:06Z 2016 book ONIX_20231201_9789535125730_552 9789535125730 9789535125723 9789535141877 https://directory.doabooks.org/handle/20.500.12854/129443 eng image/jpeg n/a https://www.intechopen.com/books/5211 https://mts.intechopen.com/storage/books/5211/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/61559 10.5772/61559 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789535125730 9789535125723 9789535141877 IntechOpen 290 open access |
| spellingShingle | thin films, chemical vapour deposition, carbon nanotubes, polymers, composite, photoluminescence thema EDItEUR::P Mathematics and Science::PN Chemistry::PNR Physical chemistry::PNRS Solid state chemistry Chemical Vapor Deposition |
| title | Chemical Vapor Deposition |
| title_full | Chemical Vapor Deposition |
| title_fullStr | Chemical Vapor Deposition |
| title_full_unstemmed | Chemical Vapor Deposition |
| title_short | Chemical Vapor Deposition |
| title_sort | chemical vapor deposition |
| topic | thin films, chemical vapour deposition, carbon nanotubes, polymers, composite, photoluminescence thema EDItEUR::P Mathematics and Science::PN Chemistry::PNR Physical chemistry::PNRS Solid state chemistry |
| topic_facet | thin films, chemical vapour deposition, carbon nanotubes, polymers, composite, photoluminescence thema EDItEUR::P Mathematics and Science::PN Chemistry::PNR Physical chemistry::PNRS Solid state chemistry |
| url | ONIX_20231201_9789535125730_552 |