Ion Implantation
Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues esp...
Furkejuvvon:
| Materiálatiipa: | Online |
|---|---|
| Giella: | eaŋgalasgiella |
| Almmustuhtton: |
IntechOpen
2023
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| Fáttát: | |
| Liŋkkat: | ONIX_20231201_9789535132387_851 |
| Fáddágilkorat: |
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| _version_ | 1869531361053769728 |
|---|---|
| collection | Directory of Open Access Books |
| description | Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials. |
| format | Online |
| id | doab-20.500.12854ir-129742 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2023 |
| publishDateRange | 2023 |
| publishDateSort | 2023 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-1297422024-04-11T20:34:50Z Ion Implantation Ahmad, Ishaq microstructure, biocompatibility, surface modification, defects, diffusion thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials. 2023-12-01T16:04:47Z 2023-12-01T16:04:47Z 2017 book ONIX_20231201_9789535132387_851 9789535132387 9789535132370 9789535147930 https://directory.doabooks.org/handle/20.500.12854/129742 eng image/jpeg n/a https://www.intechopen.com/books/5802 https://mts.intechopen.com/storage/books/5802/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/65528 10.5772/65528 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789535132387 9789535132370 9789535147930 IntechOpen 152 open access |
| spellingShingle | microstructure, biocompatibility, surface modification, defects, diffusion thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics Ion Implantation |
| title | Ion Implantation |
| title_full | Ion Implantation |
| title_fullStr | Ion Implantation |
| title_full_unstemmed | Ion Implantation |
| title_short | Ion Implantation |
| title_sort | ion implantation |
| topic | microstructure, biocompatibility, surface modification, defects, diffusion thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics |
| topic_facet | microstructure, biocompatibility, surface modification, defects, diffusion thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics |
| url | ONIX_20231201_9789535132387_851 |