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Refraktive Multifokusröntgenlinsen und Hartmann-Shack-Sensoren

Compound refractive X-ray lenses (CRLs) have an absorption-limited numerical aperture. In this work, an array of CRLs with slightly inclined optical axes is used to circumvent this limitation in full-field microscopy at laboratory sources. Among other things, fabrication of CRLs via deep X-ray litho...

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Main Author: Opolka, Alexander
Format: Online
Language:German
Published: KIT Scientific Publishing 2024
Subjects:
Multi-CRL; Shack-Hartmann sensor; full-field microscopy; LIGA; Multiröntgenlinse; Hartmann-Shack Sensor; Vollfeldmikroskopie; CRL
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials
Online Access:https://library.oapen.org/handle/20.500.12657/92886
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Summary:Compound refractive X-ray lenses (CRLs) have an absorption-limited numerical aperture. In this work, an array of CRLs with slightly inclined optical axes is used to circumvent this limitation in full-field microscopy at laboratory sources. Among other things, fabrication of CRLs via deep X-ray lithography and parallel fields of CRLs (Shack-Hartmann wavefront sensor, scanning imaging methods) are discussed.

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