Micromachined Acoustic Transducers for Audio-Frequency Range

Microelectromechanical systems (MEMSs) and acoustics have become inseparable disciplines. MEMS microphones have become one of the most successful commercial products in the history of microsystem technology. In recent years, MEMS speakers have garnered significant interest from both research and ind...

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Wydane: MDPI - Multidisciplinary Digital Publishing Institute 2025
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_version_ 1869526444490620928
collection Directory of Open Access Books
description Microelectromechanical systems (MEMSs) and acoustics have become inseparable disciplines. MEMS microphones have become one of the most successful commercial products in the history of microsystem technology. In recent years, MEMS speakers have garnered significant interest from both research and industry. This Special Issue is dedicated to showcasing works on micromachined acoustic transducers for the audio-frequency range and providing a state-of-the-art overview of this dynamic field as it pertains to audio applications.The articles in this Special Issue cover a range of topics within the domain of MEMS acoustic devices, including microphones, speakers, and hearing aids. They address key research questions related to the design, modeling, evaluation, and applications of these devices. The diverse origins of the contributing authors—from industry, academia, and research institutions—bring a multidisciplinary perspective that ensures a comprehensive and balanced exploration of the field. This diversity also guarantees the practical relevance and scientific rigor of the presented works, offering valuable insights for researchers and engineers alike.
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publishDate 2025
publishDateRange 2025
publishDateSort 2025
publisher MDPI - Multidisciplinary Digital Publishing Institute
publisherStr MDPI - Multidisciplinary Digital Publishing Institute
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spelling doab-20.500.12854ir-1651512025-08-12T08:06:31Z Micromachined Acoustic Transducers for Audio-Frequency Range Rufer, Libor microphone array turbulent boundary layer Kapton foil flight test wave number decomposition propeller spatial resolution flexible circuit board microelectromechanical systems MEMS loudspeakers microspeakers piezoelectric loudspeaker total harmonic distortion state space IEC 711 thin film PZT capacitive microphone finite element modeling reduced order modeling effective area peripheral protrusion center protrusion serpentine spring implantable acoustic transducer packaging titanium/platinum multi-layer diaphragm polymer sacrificial material DC magnetron sputtering intrinsic stress stress measurement stress relief PiezoMUMPs acoustic transducer tunable resonant frequency finite element modelling speaker imprint bipolar driving analytical modeling electroacoustic transducers MEMS microphones perforated plate aeroacoustics piezoelectric transducer microphone AOP design sensitivity control acoustic transmission characterization MEMS transducer modeling folded diaphragm n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities Microelectromechanical systems (MEMSs) and acoustics have become inseparable disciplines. MEMS microphones have become one of the most successful commercial products in the history of microsystem technology. In recent years, MEMS speakers have garnered significant interest from both research and industry. This Special Issue is dedicated to showcasing works on micromachined acoustic transducers for the audio-frequency range and providing a state-of-the-art overview of this dynamic field as it pertains to audio applications.The articles in this Special Issue cover a range of topics within the domain of MEMS acoustic devices, including microphones, speakers, and hearing aids. They address key research questions related to the design, modeling, evaluation, and applications of these devices. The diverse origins of the contributing authors—from industry, academia, and research institutions—bring a multidisciplinary perspective that ensures a comprehensive and balanced exploration of the field. This diversity also guarantees the practical relevance and scientific rigor of the presented works, offering valuable insights for researchers and engineers alike. 2025-08-12T08:06:29Z 2025-08-12T08:06:29Z 2025 book ONIX_20250812T095121_9783725832668_100 9783725832668 9783725832651 https://directory.doabooks.org/handle/20.500.12854/165151 eng image/jpeg Attribution 4.0 International https://mdpi.com/books https://mdpi.com/books/pdfview/book/10551 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-7258-3265-1 10.3390/books978-3-7258-3265-1 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783725832668 9783725832651 202 open access
spellingShingle microphone array
turbulent boundary layer
Kapton foil
flight test
wave number decomposition
propeller
spatial resolution
flexible circuit board
microelectromechanical systems
MEMS
loudspeakers
microspeakers
piezoelectric
loudspeaker
total harmonic distortion
state space
IEC 711
thin film
PZT
capacitive microphone
finite element modeling
reduced order modeling
effective area
peripheral protrusion
center protrusion
serpentine spring
implantable acoustic transducer
packaging
titanium/platinum multi-layer diaphragm
polymer sacrificial material
DC magnetron sputtering
intrinsic stress
stress measurement
stress relief
PiezoMUMPs
acoustic transducer
tunable
resonant frequency
finite element modelling
speaker
imprint
bipolar driving
analytical modeling
electroacoustic transducers
MEMS microphones
perforated plate
aeroacoustics
piezoelectric transducer
microphone
AOP
design
sensitivity control
acoustic transmission
characterization
MEMS transducer
modeling
folded diaphragm
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities
Micromachined Acoustic Transducers for Audio-Frequency Range
title Micromachined Acoustic Transducers for Audio-Frequency Range
title_full Micromachined Acoustic Transducers for Audio-Frequency Range
title_fullStr Micromachined Acoustic Transducers for Audio-Frequency Range
title_full_unstemmed Micromachined Acoustic Transducers for Audio-Frequency Range
title_short Micromachined Acoustic Transducers for Audio-Frequency Range
title_sort micromachined acoustic transducers for audio frequency range
topic microphone array
turbulent boundary layer
Kapton foil
flight test
wave number decomposition
propeller
spatial resolution
flexible circuit board
microelectromechanical systems
MEMS
loudspeakers
microspeakers
piezoelectric
loudspeaker
total harmonic distortion
state space
IEC 711
thin film
PZT
capacitive microphone
finite element modeling
reduced order modeling
effective area
peripheral protrusion
center protrusion
serpentine spring
implantable acoustic transducer
packaging
titanium/platinum multi-layer diaphragm
polymer sacrificial material
DC magnetron sputtering
intrinsic stress
stress measurement
stress relief
PiezoMUMPs
acoustic transducer
tunable
resonant frequency
finite element modelling
speaker
imprint
bipolar driving
analytical modeling
electroacoustic transducers
MEMS microphones
perforated plate
aeroacoustics
piezoelectric transducer
microphone
AOP
design
sensitivity control
acoustic transmission
characterization
MEMS transducer
modeling
folded diaphragm
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities
topic_facet microphone array
turbulent boundary layer
Kapton foil
flight test
wave number decomposition
propeller
spatial resolution
flexible circuit board
microelectromechanical systems
MEMS
loudspeakers
microspeakers
piezoelectric
loudspeaker
total harmonic distortion
state space
IEC 711
thin film
PZT
capacitive microphone
finite element modeling
reduced order modeling
effective area
peripheral protrusion
center protrusion
serpentine spring
implantable acoustic transducer
packaging
titanium/platinum multi-layer diaphragm
polymer sacrificial material
DC magnetron sputtering
intrinsic stress
stress measurement
stress relief
PiezoMUMPs
acoustic transducer
tunable
resonant frequency
finite element modelling
speaker
imprint
bipolar driving
analytical modeling
electroacoustic transducers
MEMS microphones
perforated plate
aeroacoustics
piezoelectric transducer
microphone
AOP
design
sensitivity control
acoustic transmission
characterization
MEMS transducer
modeling
folded diaphragm
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities
url ONIX_20250812T095121_9783725832668_100