Micro/Nano Manufacturing
Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...
Gardado en:
| Main Authors: | , |
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| Formato: | Online |
| Idioma: | inglés |
| Publicado: |
MDPI - Multidisciplinary Digital Publishing Institute
2021
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| Subjects: | |
| Acceso en liña: | 24933 |
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