Piezoelectric MEMS
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This remov...
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| Fformat: | Online |
| Iaith: | Saesneg |
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MDPI - Multidisciplinary Digital Publishing Institute
2021
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| Pynciau: | |
| Mynediad Ar-lein: | 27296 |
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Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
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| _version_ | 1869526511431712768 |
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| author | Ulrich Schmid (Ed.) Michael Schneider (Ed.) |
| author_browse | Michael Schneider (Ed.) Ulrich Schmid (Ed.) |
| author_facet | Ulrich Schmid (Ed.) Michael Schneider (Ed.) |
| author_sort | Ulrich Schmid (Ed.) |
| collection | Directory of Open Access Books |
| description | Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This removes inherent physical limitations present in the commonly used electrostatic transducer approach, while maintaining beneficial properties such as low-power operation. In order to exploit the full potential of piezoelectric MEMS, interdisciplinary research efforts range from investigations of advanced piezoelectric materials over the design of novel piezoelectric MEMS sensor and actuator devices, to the integration of PiezoMEMS devices into full low-power systems. In this Special Issue, the current status of this exciting research field will be presented, covering a wide range of topics including, but not limited to: • Experimental and theoretical research on piezoelectric materials such as AlN, ScAlN, ZnO or PZT, PVDF with a strong focus on the application of MEMS devices. • Deposition and synthesis techniques for piezoelectric materials enabling integration of those materials into MEMS fabrication processes. • Modelling and simulation of piezoelectric MEMS devices and systems. • Piezoelectric MEMS resonators for measuring physical quantities such as mass, acceleration, yaw rate, pressure and viscosity or density of liquids. • Optical MEMS devices, such as scanning micro mirror devices and optical switches, based on piezoelectric MEMS. • Acoustic devices, such as SAW, BAW or FBARs and acoustic transducers, based on piezoelectric MEMS, such as microphones or loudspeakers. • Piezoelectric energy harvesting devices. • Specific packaging aspects of piezoelectric devices and systems. • Low and zero power systems, featuring low-power sensors combined with energy harvesting devices, at least one of which is based on piezoelectric MEMS. |
| format | Online |
| id | doab-20.500.12854ir-56283 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | MDPI - Multidisciplinary Digital Publishing Institute |
| publisherStr | MDPI - Multidisciplinary Digital Publishing Institute |
| record_format | ojs |
| spelling | doab-20.500.12854ir-562832024-03-30T12:50:35Z Piezoelectric MEMS Ulrich Schmid (Ed.) Michael Schneider (Ed.) TK1-9971 Piezoelectric MEMS resonators Piezoelectric materials Acoustic MEMS devices Surface acoustic wave devices Smart electronics for piezoelectric devices and systems Piezoelectric energy harvesting Packaging of piezoelectric MEMS Simulation and modeling of piezoelectric MEMS thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This removes inherent physical limitations present in the commonly used electrostatic transducer approach, while maintaining beneficial properties such as low-power operation. In order to exploit the full potential of piezoelectric MEMS, interdisciplinary research efforts range from investigations of advanced piezoelectric materials over the design of novel piezoelectric MEMS sensor and actuator devices, to the integration of PiezoMEMS devices into full low-power systems. In this Special Issue, the current status of this exciting research field will be presented, covering a wide range of topics including, but not limited to: • Experimental and theoretical research on piezoelectric materials such as AlN, ScAlN, ZnO or PZT, PVDF with a strong focus on the application of MEMS devices. • Deposition and synthesis techniques for piezoelectric materials enabling integration of those materials into MEMS fabrication processes. • Modelling and simulation of piezoelectric MEMS devices and systems. • Piezoelectric MEMS resonators for measuring physical quantities such as mass, acceleration, yaw rate, pressure and viscosity or density of liquids. • Optical MEMS devices, such as scanning micro mirror devices and optical switches, based on piezoelectric MEMS. • Acoustic devices, such as SAW, BAW or FBARs and acoustic transducers, based on piezoelectric MEMS, such as microphones or loudspeakers. • Piezoelectric energy harvesting devices. • Specific packaging aspects of piezoelectric devices and systems. • Low and zero power systems, featuring low-power sensors combined with energy harvesting devices, at least one of which is based on piezoelectric MEMS. 2021-02-11T22:57:06Z 2021-02-11T22:57:06Z 2018-07-10 12:55:10 2018 book 27296 9783038970057 9783038970064 https://directory.doabooks.org/handle/20.500.12854/56283 eng image/png Attribution-NonCommercial-NoDerivatives 4.0 International http://www.mdpi.com/books/pdfview/book/672 http://www.mdpi.com/books/pdfview/book/672 MDPI - Multidisciplinary Digital Publishing Institute 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783038970057 9783038970064 VIII, 168 open access |
| spellingShingle | TK1-9971 Piezoelectric MEMS resonators Piezoelectric materials Acoustic MEMS devices Surface acoustic wave devices Smart electronics for piezoelectric devices and systems Piezoelectric energy harvesting Packaging of piezoelectric MEMS Simulation and modeling of piezoelectric MEMS thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities Ulrich Schmid (Ed.) Michael Schneider (Ed.) Piezoelectric MEMS |
| title | Piezoelectric MEMS |
| title_full | Piezoelectric MEMS |
| title_fullStr | Piezoelectric MEMS |
| title_full_unstemmed | Piezoelectric MEMS |
| title_short | Piezoelectric MEMS |
| title_sort | piezoelectric mems |
| topic | TK1-9971 Piezoelectric MEMS resonators Piezoelectric materials Acoustic MEMS devices Surface acoustic wave devices Smart electronics for piezoelectric devices and systems Piezoelectric energy harvesting Packaging of piezoelectric MEMS Simulation and modeling of piezoelectric MEMS thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities |
| topic_facet | TK1-9971 Piezoelectric MEMS resonators Piezoelectric materials Acoustic MEMS devices Surface acoustic wave devices Smart electronics for piezoelectric devices and systems Piezoelectric energy harvesting Packaging of piezoelectric MEMS Simulation and modeling of piezoelectric MEMS thema EDItEUR::K Economics, Finance, Business and Management::KN Industry and industrial studies::KNB Energy industries and utilities |
| url | 27296 |
| work_keys_str_mv | AT ulrichschmided piezoelectricmems AT michaelschneidered piezoelectricmems |