Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen

This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.

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Dettagli Bibliografici
Autore principale: Heneka, Jochen
Natura: Online
Lingua:tedesco
Pubblicazione: KIT Scientific Publishing 2021
Soggetti:
Accesso online:35543
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