Recent Advances in Nanofabrication Techniques and Applications
Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" a...
Gorde:
| Formatua: | Online |
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| Hizkuntza: | ingelesa |
| Argitaratua: |
IntechOpen
2021
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| Gaiak: | |
| Sarrera elektronikoa: | ONIX_20210420_9789533076027_694 |
| Etiketak: |
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| _version_ | 1869515212013436928 |
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| collection | Directory of Open Access Books |
| description | Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography. |
| format | Online |
| id | doab-20.500.12854ir-65337 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-653372024-04-05T12:36:44Z Recent Advances in Nanofabrication Techniques and Applications Cui, Bo Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography. 2021-04-20T15:14:49Z 2021-04-20T15:14:49Z 2011 book ONIX_20210420_9789533076027_694 9789533076027 9789535155546 https://directory.doabooks.org/handle/20.500.12854/65337 eng image/jpeg n/a https://www.intechopen.com/books https://mts.intechopen.com/storage/books/334/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/859 10.5772/859 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789533076027 9789535155546 IntechOpen 628 open access |
| spellingShingle | Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) Recent Advances in Nanofabrication Techniques and Applications |
| title | Recent Advances in Nanofabrication Techniques and Applications |
| title_full | Recent Advances in Nanofabrication Techniques and Applications |
| title_fullStr | Recent Advances in Nanofabrication Techniques and Applications |
| title_full_unstemmed | Recent Advances in Nanofabrication Techniques and Applications |
| title_short | Recent Advances in Nanofabrication Techniques and Applications |
| title_sort | recent advances in nanofabrication techniques and applications |
| topic | Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) |
| topic_facet | Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) |
| url | ONIX_20210420_9789533076027_694 |