Advanced Strategies in Thin Film Engineering by Magnetron Sputtering

Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reac...

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Natura:	Online
Lingua:	inglese
Pubblicazione:	MDPI - Multidisciplinary Digital Publishing Institute 2021
Soggetti:	thema EDItEUR::G Reference, Information and Interdisciplinary subjects::GP Research and information: general
Accesso online:	ONIX_20210501_9783039364299_539
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