| _version_ | 1869535994828554240 |
|---|---|
| collection | Directory of Open Access |
| format | Online |
| id | oai:doaj.orgir-journal:ebebc30aa56a490dbb78705fc7a7553e |
| institution | Directory of Open Access |
| language | EN |
| publishDate | 2023 |
| publishDateRange | 2023 |
| publishDateSort | 2023 |
| publisher | MDPI AG |
| publisherStr | MDPI AG |
| record_format | ojs |
| spelling | oai:doaj.orgir-journal:ebebc30aa56a490dbb78705fc7a7553e2026-01-15T10:37:26ZNanomanufacturing2673-687Xhttps://doaj.org/toc/2673-687XENCC BYMDPI AGhttps://www.mdpi.com/journal/nanomanufacturing/abouthttps://www.mdpi.com/apchttps://www.mdpi.com/journal/nanomanufacturing/instructionshttps://www.mdpi.com/journal/nanomanufacturing2023-02-08T22:05:42Zjournalmicro- and nanoelectromechanical systemsplasma surface engineeringplasma etchinglaser surface engineering3d nanomanufacturingphotonic and plasmonic devicesManufacturing industriesHD9720-9975Plasma engineering. Applied plasma dynamicsTA2001-2040 |
| spellingShingle | micro- and nanoelectromechanical systems plasma surface engineering plasma etching laser surface engineering 3d nanomanufacturing photonic and plasmonic devices Manufacturing industries HD9720-9975 Plasma engineering. Applied plasma dynamics TA2001-2040 Nanomanufacturing |
| title | Nanomanufacturing |
| title_full | Nanomanufacturing |
| title_fullStr | Nanomanufacturing |
| title_full_unstemmed | Nanomanufacturing |
| title_short | Nanomanufacturing |
| title_sort | nanomanufacturing |
| topic | micro- and nanoelectromechanical systems plasma surface engineering plasma etching laser surface engineering 3d nanomanufacturing photonic and plasmonic devices Manufacturing industries HD9720-9975 Plasma engineering. Applied plasma dynamics TA2001-2040 |
| topic_facet | micro- and nanoelectromechanical systems plasma surface engineering plasma etching laser surface engineering 3d nanomanufacturing photonic and plasmonic devices Manufacturing industries HD9720-9975 Plasma engineering. Applied plasma dynamics TA2001-2040 |
| url | 2673-687X |