Chemical Vapor Deposition for Nanotechnology

Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the...

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Détails bibliographiques

Format:	Online
Langue:	anglais
Publié:	IntechOpen 2023
Sujets:	graphene, thin films, polymers, plasma, evaporation, growth mechanism thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science
Accès en ligne:	ONIX_20231201_9781789849615_1814
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