Advances in Thin Film Fabrication by Magnetron Sputtering

Magnetron sputtering technology is one of the most popular PVD methods used in the industry. Its importance is predicted to increase due to the current developments in research centers engaged in that particular domain. Developments are due to the modifications introduced into the sputtering technol...

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description Magnetron sputtering technology is one of the most popular PVD methods used in the industry. Its importance is predicted to increase due to the current developments in research centers engaged in that particular domain. Developments are due to the modifications introduced into the sputtering technology itself (e.g., the use of innovative plasma sources, innovative technical means for influencing the state of the magnetron plasma, innovative approaches to the plasma’s state and its control) and the production of new coating materials with functional properties that enable them to meet the needs of the modern industry. This reprint aims to present a collection of ideas describing recent advances in thin-film manufacturing technology, focusing on the influence of magnetron sputtering modification on the film synthesis conditions, parameters, and properties of the films that are produced.
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publishDate 2024
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publisher MDPI - Multidisciplinary Digital Publishing Institute
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spelling doab-20.500.12854ir-1377332024-05-14T14:17:19Z Advances in Thin Film Fabrication by Magnetron Sputtering Chodun‬, Rafal CuGa2O4 cubic spinel annealing studies optical characteristics XRD electrical characteristics Fe3Si film facing targets sputtering wettability mechanical property plasma treatment Cu2In2O5 RF sputtering morphology studies optical bandgap textured silicon aluminum-doped zinc oxide solar cells diffusion barrier thermal stability ferromagnetic target sputtering nickel sputtering hot sputtering hot target nickel coatings gas injection magnetron sputtering GIMS magnetron sputtering TC4 titanium alloy micro arc oxidation HEA film microstructure and properties sputtering thin film ScAlN ferroelectrics titanium nitride DC/RF magnetron-sputtering saturable absorber materials Q-switched fiber lasers fiber micro-ball lens no-core fiber lossy mode resonance fiber refractometers transparent oxide semiconductor copper-titanium mixed oxides p-type semiconductors optical and electrical properties gas sensor cross section preparation techniques SEM FIB/Ga PFIB/Xe thin-film materials multilayer DC magnetron sputtering particle-in-cell simulation oxide thin films TiOx (Ti,Co)Ox CoOx cobalt gas impulse magnetron sputtering semitransparent amorphous coatings thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues Magnetron sputtering technology is one of the most popular PVD methods used in the industry. Its importance is predicted to increase due to the current developments in research centers engaged in that particular domain. Developments are due to the modifications introduced into the sputtering technology itself (e.g., the use of innovative plasma sources, innovative technical means for influencing the state of the magnetron plasma, innovative approaches to the plasma’s state and its control) and the production of new coating materials with functional properties that enable them to meet the needs of the modern industry. This reprint aims to present a collection of ideas describing recent advances in thin-film manufacturing technology, focusing on the influence of magnetron sputtering modification on the film synthesis conditions, parameters, and properties of the films that are produced. 2024-05-14T14:17:14Z 2024-05-14T14:17:14Z 2024 book ONIX_20240514_9783725806072_329 9783725806072 9783725806089 https://directory.doabooks.org/handle/20.500.12854/137733 eng application/octet-stream Attribution-NonCommercial-NoDerivatives 4.0 International https://mdpi.com/books/pdfview/book/8962 https://mdpi.com/books/pdfview/book/8962 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-7258-0608-9 10.3390/books978-3-7258-0608-9 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783725806072 9783725806089 188 open access
spellingShingle CuGa2O4
cubic spinel
annealing studies
optical characteristics
XRD
electrical characteristics
Fe3Si film
facing targets sputtering
wettability
mechanical property
plasma treatment
Cu2In2O5
RF sputtering
morphology studies
optical bandgap
textured silicon
aluminum-doped zinc oxide
solar cells
diffusion barrier
thermal stability
ferromagnetic target sputtering
nickel sputtering
hot sputtering
hot target
nickel coatings
gas injection magnetron sputtering
GIMS
magnetron sputtering
TC4 titanium alloy
micro arc oxidation
HEA film
microstructure and properties
sputtering
thin film
ScAlN
ferroelectrics
titanium nitride
DC/RF magnetron-sputtering
saturable absorber materials
Q-switched fiber lasers
fiber micro-ball lens
no-core fiber
lossy mode resonance
fiber refractometers
transparent oxide semiconductor
copper-titanium mixed oxides
p-type semiconductors
optical and electrical properties
gas sensor
cross section
preparation techniques
SEM
FIB/Ga
PFIB/Xe
thin-film materials
multilayer
DC magnetron sputtering
particle-in-cell simulation
oxide thin films
TiOx
(Ti,Co)Ox
CoOx
cobalt
gas impulse magnetron sputtering
semitransparent
amorphous coatings
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
Advances in Thin Film Fabrication by Magnetron Sputtering
title Advances in Thin Film Fabrication by Magnetron Sputtering
title_full Advances in Thin Film Fabrication by Magnetron Sputtering
title_fullStr Advances in Thin Film Fabrication by Magnetron Sputtering
title_full_unstemmed Advances in Thin Film Fabrication by Magnetron Sputtering
title_short Advances in Thin Film Fabrication by Magnetron Sputtering
title_sort advances in thin film fabrication by magnetron sputtering
topic CuGa2O4
cubic spinel
annealing studies
optical characteristics
XRD
electrical characteristics
Fe3Si film
facing targets sputtering
wettability
mechanical property
plasma treatment
Cu2In2O5
RF sputtering
morphology studies
optical bandgap
textured silicon
aluminum-doped zinc oxide
solar cells
diffusion barrier
thermal stability
ferromagnetic target sputtering
nickel sputtering
hot sputtering
hot target
nickel coatings
gas injection magnetron sputtering
GIMS
magnetron sputtering
TC4 titanium alloy
micro arc oxidation
HEA film
microstructure and properties
sputtering
thin film
ScAlN
ferroelectrics
titanium nitride
DC/RF magnetron-sputtering
saturable absorber materials
Q-switched fiber lasers
fiber micro-ball lens
no-core fiber
lossy mode resonance
fiber refractometers
transparent oxide semiconductor
copper-titanium mixed oxides
p-type semiconductors
optical and electrical properties
gas sensor
cross section
preparation techniques
SEM
FIB/Ga
PFIB/Xe
thin-film materials
multilayer
DC magnetron sputtering
particle-in-cell simulation
oxide thin films
TiOx
(Ti,Co)Ox
CoOx
cobalt
gas impulse magnetron sputtering
semitransparent
amorphous coatings
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
topic_facet CuGa2O4
cubic spinel
annealing studies
optical characteristics
XRD
electrical characteristics
Fe3Si film
facing targets sputtering
wettability
mechanical property
plasma treatment
Cu2In2O5
RF sputtering
morphology studies
optical bandgap
textured silicon
aluminum-doped zinc oxide
solar cells
diffusion barrier
thermal stability
ferromagnetic target sputtering
nickel sputtering
hot sputtering
hot target
nickel coatings
gas injection magnetron sputtering
GIMS
magnetron sputtering
TC4 titanium alloy
micro arc oxidation
HEA film
microstructure and properties
sputtering
thin film
ScAlN
ferroelectrics
titanium nitride
DC/RF magnetron-sputtering
saturable absorber materials
Q-switched fiber lasers
fiber micro-ball lens
no-core fiber
lossy mode resonance
fiber refractometers
transparent oxide semiconductor
copper-titanium mixed oxides
p-type semiconductors
optical and electrical properties
gas sensor
cross section
preparation techniques
SEM
FIB/Ga
PFIB/Xe
thin-film materials
multilayer
DC magnetron sputtering
particle-in-cell simulation
oxide thin films
TiOx
(Ti,Co)Ox
CoOx
cobalt
gas impulse magnetron sputtering
semitransparent
amorphous coatings
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
url ONIX_20240514_9783725806072_329