Laser-Based Nano Fabrication and Nano Lithography
The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication...
Furkejuvvon:
| Váldodahkkit: | , |
|---|---|
| Materiálatiipa: | Online |
| Giella: | eaŋgalasgiella |
| Almmustuhtton: |
MDPI - Multidisciplinary Digital Publishing Institute
2021
|
| Fáttát: | |
| Liŋkkat: | 29762 |
| Fáddágilkorat: |
Eai fáddágilkorat, Lasit vuosttaš fáddágilkora!
|
| _version_ | 1869527963980005376 |
|---|---|
| author | Koji Sugioka (Ed.) Ya Cheng (Ed.) |
| author_browse | Koji Sugioka (Ed.) Ya Cheng (Ed.) |
| author_facet | Koji Sugioka (Ed.) Ya Cheng (Ed.) |
| author_sort | Koji Sugioka (Ed.) |
| collection | Directory of Open Access Books |
| description | The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication resolution of laser processing is, however, limited by the diffraction limit. Recently, much effort has been made to overcome the diffraction limit in nano fabrication. Specifically, combinations of multiphoton absorption by ultrafast lasers and the threshold effect associated with a Gaussian beam profile provide fabrication resolutions far beyond the diffraction limit. The use of the optical near-field achieves nano ablation with feature sizes below 100 nm. Multiple pulse irradiation from the linearly polarized ultrafast laser produces periodic nanostructures with a spatial period much smaller than the wavelength. Unlimited diffraction resolutions can also be achieved with shaped laser beams. In the meanwhile, lasers are also widely used for the synthesis of nano materials including fullerenes and nano particles. In view of the rapid advancement of this field in recent years, this Special Issue aims to introduce the state-of-the-art in nano fabrication and nano lithography, based on laser technologies, by leading groups in the field. |
| format | Online |
| id | doab-20.500.12854ir-51441 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | MDPI - Multidisciplinary Digital Publishing Institute |
| publisherStr | MDPI - Multidisciplinary Digital Publishing Institute |
| record_format | ojs |
| spelling | doab-20.500.12854ir-514412024-04-05T12:39:49Z Laser-Based Nano Fabrication and Nano Lithography Koji Sugioka (Ed.) Ya Cheng (Ed.) QD1-999 TP155-156 Laser processing Nano fabrication 3D fabrication Nano material synthesis Nano ripple formation thema EDItEUR::P Mathematics and Science::PN Chemistry The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication resolution of laser processing is, however, limited by the diffraction limit. Recently, much effort has been made to overcome the diffraction limit in nano fabrication. Specifically, combinations of multiphoton absorption by ultrafast lasers and the threshold effect associated with a Gaussian beam profile provide fabrication resolutions far beyond the diffraction limit. The use of the optical near-field achieves nano ablation with feature sizes below 100 nm. Multiple pulse irradiation from the linearly polarized ultrafast laser produces periodic nanostructures with a spatial period much smaller than the wavelength. Unlimited diffraction resolutions can also be achieved with shaped laser beams. In the meanwhile, lasers are also widely used for the synthesis of nano materials including fullerenes and nano particles. In view of the rapid advancement of this field in recent years, this Special Issue aims to introduce the state-of-the-art in nano fabrication and nano lithography, based on laser technologies, by leading groups in the field. 2021-02-11T17:28:31Z 2021-02-11T17:28:31Z 2018-12-07 12:16:05 2018 book 29762 9783038974109 9783038974116 https://directory.doabooks.org/handle/20.500.12854/51441 eng image/jpeg Attribution-NonCommercial-NoDerivatives 4.0 International https://play.google.com/books/publish/a/14935057684283403269#details/ISBN:9783038974109 https://www.mdpi.com/books/pdfview/book/1049 https://www.mdpi.com/books/pdfview/book/1049 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-03897-411-6 10.3390/books978-3-03897-411-6 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783038974109 9783038974116 154 open access |
| spellingShingle | QD1-999 TP155-156 Laser processing Nano fabrication 3D fabrication Nano material synthesis Nano ripple formation thema EDItEUR::P Mathematics and Science::PN Chemistry Koji Sugioka (Ed.) Ya Cheng (Ed.) Laser-Based Nano Fabrication and Nano Lithography |
| title | Laser-Based Nano Fabrication and Nano Lithography |
| title_full | Laser-Based Nano Fabrication and Nano Lithography |
| title_fullStr | Laser-Based Nano Fabrication and Nano Lithography |
| title_full_unstemmed | Laser-Based Nano Fabrication and Nano Lithography |
| title_short | Laser-Based Nano Fabrication and Nano Lithography |
| title_sort | laser based nano fabrication and nano lithography |
| topic | QD1-999 TP155-156 Laser processing Nano fabrication 3D fabrication Nano material synthesis Nano ripple formation thema EDItEUR::P Mathematics and Science::PN Chemistry |
| topic_facet | QD1-999 TP155-156 Laser processing Nano fabrication 3D fabrication Nano material synthesis Nano ripple formation thema EDItEUR::P Mathematics and Science::PN Chemistry |
| url | 29762 |
| work_keys_str_mv | AT kojisugiokaed laserbasednanofabricationandnanolithography AT yachenged laserbasednanofabricationandnanolithography |