Laser-Based Nano Fabrication and Nano Lithography

The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication...

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Bibliographic Details

Main Authors:	Koji Sugioka (Ed.), Ya Cheng (Ed.)
Format:	Online
Language:	English
Published:	MDPI - Multidisciplinary Digital Publishing Institute 2021
Subjects:	QD1-999 TP155-156 Laser processing Nano fabrication 3D fabrication Nano material synthesis Nano ripple formation thema EDItEUR::P Mathematics and Science::PN Chemistry
Online Access:	29762
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