MEMS Accelerometers
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Acceleromete...
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| Үндсэн зохиолчид: | , , |
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| Формат: | Online |
| Хэл сонгох: | англи |
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MDPI - Multidisciplinary Digital Publishing Institute
2021
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| Нөхцлүүд: | |
| Онлайн хандалт: | 33655 |
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Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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| _version_ | 1869528269304365056 |
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| author | Ngo, Ha Duong Rasras, Mahmoud Elfadel, Ibrahim (Abe) M. |
| author_browse | Elfadel, Ibrahim (Abe) M. Ngo, Ha Duong Rasras, Mahmoud |
| author_facet | Ngo, Ha Duong Rasras, Mahmoud Elfadel, Ibrahim (Abe) M. |
| author_sort | Ngo, Ha Duong |
| collection | Directory of Open Access Books |
| description | Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. |
| format | Online |
| id | doab-20.500.12854ir-53145 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | MDPI - Multidisciplinary Digital Publishing Institute |
| publisherStr | MDPI - Multidisciplinary Digital Publishing Institute |
| record_format | ojs |
| spelling | doab-20.500.12854ir-531452024-04-11T15:10:33Z MEMS Accelerometers Ngo, Ha Duong Rasras, Mahmoud Elfadel, Ibrahim (Abe) M. TA1-2040 T1-995 micromachining n/a turbulent kinetic energy dissipation rate microelectromechanical systems (MEMS) piezoresistive sensor chip WiFi-RSSI radio map step detection built-in self-test regularity of activity motion analysis gait analysis frequency acceleration MEMS accelerometer zero-velocity update rehabilitation assessment vacuum microelectronic dance classification Kerr noise MEMS micro machining MEMS sensors stereo visual-inertial odometry self-coaching miniaturization wavelet packet three-axis acceleration sensor MEMS-IMU accelerometer performance characterization electrostatic stiffness delaying mechanism three-axis accelerometer angular-rate sensing indoor positioning whispering-gallery-mode sensitivity heat convection multi-axis sensing L-shaped beam stride length estimation activity monitoring process optimization mismatch of parasitic capacitance electromechanical delta-sigma cathode tips array in situ self-testing high acceleration sensor deep learning marine environmental monitoring accelerometer fault tolerant hostile environment micro-electro-mechanical systems (MEMS) low-temperature co-fired ceramic (LTCC) classification of horse gaits Taguchi method interface ASIC capacitive transduction digital resonator safety and arming system inertial sensors MEMS technology sleep time duration detection field emission probe piezoresistive effect capacitive accelerometer auto-encoder MEMS-IMU body sensor network optical microresonator wireless hybrid integrated mode splitting thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. 2021-02-11T19:15:16Z 2021-02-11T19:15:16Z 2019-06-26 08:44:06 2019 book 33655 9783038974154 9783038974147 https://directory.doabooks.org/handle/20.500.12854/53145 eng image/jpeg Attribution-NonCommercial-NoDerivatives 4.0 International https://mdpi.com/books/pdfview/book/1313 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-03897-415-4 10.3390/books978-3-03897-415-4 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783038974154 9783038974147 252 open access |
| spellingShingle | TA1-2040 T1-995 micromachining n/a turbulent kinetic energy dissipation rate microelectromechanical systems (MEMS) piezoresistive sensor chip WiFi-RSSI radio map step detection built-in self-test regularity of activity motion analysis gait analysis frequency acceleration MEMS accelerometer zero-velocity update rehabilitation assessment vacuum microelectronic dance classification Kerr noise MEMS micro machining MEMS sensors stereo visual-inertial odometry self-coaching miniaturization wavelet packet three-axis acceleration sensor MEMS-IMU accelerometer performance characterization electrostatic stiffness delaying mechanism three-axis accelerometer angular-rate sensing indoor positioning whispering-gallery-mode sensitivity heat convection multi-axis sensing L-shaped beam stride length estimation activity monitoring process optimization mismatch of parasitic capacitance electromechanical delta-sigma cathode tips array in situ self-testing high acceleration sensor deep learning marine environmental monitoring accelerometer fault tolerant hostile environment micro-electro-mechanical systems (MEMS) low-temperature co-fired ceramic (LTCC) classification of horse gaits Taguchi method interface ASIC capacitive transduction digital resonator safety and arming system inertial sensors MEMS technology sleep time duration detection field emission probe piezoresistive effect capacitive accelerometer auto-encoder MEMS-IMU body sensor network optical microresonator wireless hybrid integrated mode splitting thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology Ngo, Ha Duong Rasras, Mahmoud Elfadel, Ibrahim (Abe) M. MEMS Accelerometers |
| title | MEMS Accelerometers |
| title_full | MEMS Accelerometers |
| title_fullStr | MEMS Accelerometers |
| title_full_unstemmed | MEMS Accelerometers |
| title_short | MEMS Accelerometers |
| title_sort | mems accelerometers |
| topic | TA1-2040 T1-995 micromachining n/a turbulent kinetic energy dissipation rate microelectromechanical systems (MEMS) piezoresistive sensor chip WiFi-RSSI radio map step detection built-in self-test regularity of activity motion analysis gait analysis frequency acceleration MEMS accelerometer zero-velocity update rehabilitation assessment vacuum microelectronic dance classification Kerr noise MEMS micro machining MEMS sensors stereo visual-inertial odometry self-coaching miniaturization wavelet packet three-axis acceleration sensor MEMS-IMU accelerometer performance characterization electrostatic stiffness delaying mechanism three-axis accelerometer angular-rate sensing indoor positioning whispering-gallery-mode sensitivity heat convection multi-axis sensing L-shaped beam stride length estimation activity monitoring process optimization mismatch of parasitic capacitance electromechanical delta-sigma cathode tips array in situ self-testing high acceleration sensor deep learning marine environmental monitoring accelerometer fault tolerant hostile environment micro-electro-mechanical systems (MEMS) low-temperature co-fired ceramic (LTCC) classification of horse gaits Taguchi method interface ASIC capacitive transduction digital resonator safety and arming system inertial sensors MEMS technology sleep time duration detection field emission probe piezoresistive effect capacitive accelerometer auto-encoder MEMS-IMU body sensor network optical microresonator wireless hybrid integrated mode splitting thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology |
| topic_facet | TA1-2040 T1-995 micromachining n/a turbulent kinetic energy dissipation rate microelectromechanical systems (MEMS) piezoresistive sensor chip WiFi-RSSI radio map step detection built-in self-test regularity of activity motion analysis gait analysis frequency acceleration MEMS accelerometer zero-velocity update rehabilitation assessment vacuum microelectronic dance classification Kerr noise MEMS micro machining MEMS sensors stereo visual-inertial odometry self-coaching miniaturization wavelet packet three-axis acceleration sensor MEMS-IMU accelerometer performance characterization electrostatic stiffness delaying mechanism three-axis accelerometer angular-rate sensing indoor positioning whispering-gallery-mode sensitivity heat convection multi-axis sensing L-shaped beam stride length estimation activity monitoring process optimization mismatch of parasitic capacitance electromechanical delta-sigma cathode tips array in situ self-testing high acceleration sensor deep learning marine environmental monitoring accelerometer fault tolerant hostile environment micro-electro-mechanical systems (MEMS) low-temperature co-fired ceramic (LTCC) classification of horse gaits Taguchi method interface ASIC capacitive transduction digital resonator safety and arming system inertial sensors MEMS technology sleep time duration detection field emission probe piezoresistive effect capacitive accelerometer auto-encoder MEMS-IMU body sensor network optical microresonator wireless hybrid integrated mode splitting thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology |
| url | 33655 |
| work_keys_str_mv | AT ngohaduong memsaccelerometers AT rasrasmahmoud memsaccelerometers AT elfadelibrahimabem memsaccelerometers |