Buchumschlag

Design and Fabrication of Micro/Nano Sensors and Actuators

With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano-sensors and micro/nano-actuators, have been developed and applied in various fields. These devices are mostly made of silicon, metals, ceramics, glass, etc., whose m...

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Gespeichert in:
Format: Online
Sprache:Englisch
Veröffentlicht: MDPI - Multidisciplinary Digital Publishing Institute 2024
Schlagworte:
resonant accelerometer
temperature compensation
difference
stiction effect
temporary handling
SETH
CMOS
MEMS
tactile sensor
stiction-contact
Au–Si eutectic
flip-chip
microneedle
laser machining
polylactic acid
electrochemical detection
biomolecules
magnetic sensor
bulk acoustic wave
magnetic composite
ME heterostructure
resonance enhanced
magnetoelectric coupling
skin friction sensors
shock tunnel experiment
fast readout circuit
bulk acoustic wave (BAW)
magnetoelectric transducer
antenna
transmitter
implantable medical devices (IMDs)
resonance modes
frequency modulation
radiation power
FEA
resistive strain gauge
gauge factor
sensitive grids
micro-morphology
force sensor
vibration sensor
four-cantilever beam
single-crystal LiNbO3
output charge sensitivity
temperature dependence
inertial switch
threshold acceleration
sensitive direction
contact effect
fabrication
γ-GDY
first-principles
dope
vacancy defect
hydrogen storage property
micro metal coil
MEMS processing technology
flexible electronic process
magnetic film
printing process
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation
Online-Zugang:ONIX_20240906_9783725815449_179
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ONIX_20240906_9783725815449_179

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