Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II
Microelectromechanical systems (MEMS) are microdevices or systems that integrate microsensors, microconverters, microactuators, micromechanical structures, and micropower sources. MEMS devices have a wide range of applications in biomedical, automotive, aerospace, and communications fields, among va...
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| Materialtyp: | Online |
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| Språk: | engelska |
| Utgiven: |
MDPI - Multidisciplinary Digital Publishing Institute
2024
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| Ämnen: | |
| Länkar: | ONIX_20240906_9783725815463_180 |
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