Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II

Microelectromechanical systems (MEMS) are microdevices or systems that integrate microsensors, microconverters, microactuators, micromechanical structures, and micropower sources. MEMS devices have a wide range of applications in biomedical, automotive, aerospace, and communications fields, among va...

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Bibliografiska uppgifter
Materialtyp: Online
Språk:engelska
Utgiven: MDPI - Multidisciplinary Digital Publishing Institute 2024
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Länkar:ONIX_20240906_9783725815463_180
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