Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II
Microelectromechanical systems (MEMS) are microdevices or systems that integrate microsensors, microconverters, microactuators, micromechanical structures, and micropower sources. MEMS devices have a wide range of applications in biomedical, automotive, aerospace, and communications fields, among va...
Salvato in:
| Natura: | Online |
|---|---|
| Lingua: | inglese |
| Pubblicazione: |
MDPI - Multidisciplinary Digital Publishing Institute
2024
|
| Soggetti: | |
| Accesso online: | ONIX_20240906_9783725815463_180 |
| Tags: |
Nessun Tag, puoi essere il primo ad aggiungerne!!
|
| _version_ | 1869521853695918080 |
|---|---|
| collection | Directory of Open Access Books |
| description | Microelectromechanical systems (MEMS) are microdevices or systems that integrate microsensors, microconverters, microactuators, micromechanical structures, and micropower sources. MEMS devices have a wide range of applications in biomedical, automotive, aerospace, and communications fields, among various others. The design, optimization, performance, and application of the devices are crucial to the development of modern technology. In terms of design, MEMS devices need to overcome various challenges, such as size constraints, material selection, and manufacturing processes, to achieve high integration and miniaturization. Optimizing the design and performance of MEMS devices is of great significance for improving system efficiency, reducing costs, and enhancing functionality, and it is one of the current research hotspots. The performance of MEMS devices involves sensitivity, stability, power consumption, and other aspects to meet the requirements of various applications. This Special Issue explores key issues in the design, optimization, performance, and application of MEMS devices in order to provide a reference for research and development in related fields. |
| format | Online |
| id | doab-20.500.12854ir-143818 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2024 |
| publishDateRange | 2024 |
| publishDateSort | 2024 |
| publisher | MDPI - Multidisciplinary Digital Publishing Institute |
| publisherStr | MDPI - Multidisciplinary Digital Publishing Institute |
| record_format | ojs |
| spelling | doab-20.500.12854ir-1438182024-09-06T08:31:56Z Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II Wang, Weidong Ruan, Yong Zhou, Zai-Fa skin friction sensor 3D models CFD turbulent flow laminar flow friction measurement accuracy thin film thermocouples temperature anneal complementary split ring resonator metamaterial-based sensor quality factor multi-crack detection higher-mode substrate-integrated waveguide acoustofluidics acousto-optic effect SAW chip PSO BP neural network NSGA-II MEMS HRG hemispherical resonant gyro common-mode feedback micro-capacitor detection low noise thin-film type heat flow sensor thermal resistance layer thermopile finite element simulation graphene fibers vitamin C thermoelectric flexible temperature sensors MEMS pressure sensor wind effect altitude estimation microelectromechanical system electrochemical angular accelerometer rotational sensor silicon-based four-electrode structure n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation Microelectromechanical systems (MEMS) are microdevices or systems that integrate microsensors, microconverters, microactuators, micromechanical structures, and micropower sources. MEMS devices have a wide range of applications in biomedical, automotive, aerospace, and communications fields, among various others. The design, optimization, performance, and application of the devices are crucial to the development of modern technology. In terms of design, MEMS devices need to overcome various challenges, such as size constraints, material selection, and manufacturing processes, to achieve high integration and miniaturization. Optimizing the design and performance of MEMS devices is of great significance for improving system efficiency, reducing costs, and enhancing functionality, and it is one of the current research hotspots. The performance of MEMS devices involves sensitivity, stability, power consumption, and other aspects to meet the requirements of various applications. This Special Issue explores key issues in the design, optimization, performance, and application of MEMS devices in order to provide a reference for research and development in related fields. 2024-09-06T08:31:53Z 2024-09-06T08:31:53Z 2024 book ONIX_20240906_9783725815463_180 9783725815463 9783725815456 https://directory.doabooks.org/handle/20.500.12854/143818 eng application/octet-stream Attribution-NonCommercial-NoDerivatives 4.0 International https://mdpi.com/books/pdfview/book/9568 https://mdpi.com/books/pdfview/book/9568 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-7258-1545-6 10.3390/books978-3-7258-1545-6 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783725815463 9783725815456 open access |
| spellingShingle | skin friction sensor 3D models CFD turbulent flow laminar flow friction measurement accuracy thin film thermocouples temperature anneal complementary split ring resonator metamaterial-based sensor quality factor multi-crack detection higher-mode substrate-integrated waveguide acoustofluidics acousto-optic effect SAW chip PSO BP neural network NSGA-II MEMS HRG hemispherical resonant gyro common-mode feedback micro-capacitor detection low noise thin-film type heat flow sensor thermal resistance layer thermopile finite element simulation graphene fibers vitamin C thermoelectric flexible temperature sensors MEMS pressure sensor wind effect altitude estimation microelectromechanical system electrochemical angular accelerometer rotational sensor silicon-based four-electrode structure n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II |
| title | Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II |
| title_full | Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II |
| title_fullStr | Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II |
| title_full_unstemmed | Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II |
| title_short | Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II |
| title_sort | design and fabrication of micro nano sensors and actuators volume ii |
| topic | skin friction sensor 3D models CFD turbulent flow laminar flow friction measurement accuracy thin film thermocouples temperature anneal complementary split ring resonator metamaterial-based sensor quality factor multi-crack detection higher-mode substrate-integrated waveguide acoustofluidics acousto-optic effect SAW chip PSO BP neural network NSGA-II MEMS HRG hemispherical resonant gyro common-mode feedback micro-capacitor detection low noise thin-film type heat flow sensor thermal resistance layer thermopile finite element simulation graphene fibers vitamin C thermoelectric flexible temperature sensors MEMS pressure sensor wind effect altitude estimation microelectromechanical system electrochemical angular accelerometer rotational sensor silicon-based four-electrode structure n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation |
| topic_facet | skin friction sensor 3D models CFD turbulent flow laminar flow friction measurement accuracy thin film thermocouples temperature anneal complementary split ring resonator metamaterial-based sensor quality factor multi-crack detection higher-mode substrate-integrated waveguide acoustofluidics acousto-optic effect SAW chip PSO BP neural network NSGA-II MEMS HRG hemispherical resonant gyro common-mode feedback micro-capacitor detection low noise thin-film type heat flow sensor thermal resistance layer thermopile finite element simulation graphene fibers vitamin C thermoelectric flexible temperature sensors MEMS pressure sensor wind effect altitude estimation microelectromechanical system electrochemical angular accelerometer rotational sensor silicon-based four-electrode structure n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation |
| url | ONIX_20240906_9783725815463_180 |