Design and Fabrication of Micro/Nano Sensors and Actuators

With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano-sensors and micro/nano-actuators, have been developed and applied in various fields. These devices are mostly made of silicon, metals, ceramics, glass, etc., whose m...

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Format:	Online
Idioma:	anglès
Publicat:	MDPI - Multidisciplinary Digital Publishing Institute 2024
Matèries:	resonant accelerometer temperature compensation difference stiction effect temporary handling SETH CMOS MEMS tactile sensor stiction-contact Au–Si eutectic flip-chip microneedle laser machining polylactic acid electrochemical detection biomolecules magnetic sensor bulk acoustic wave magnetic composite ME heterostructure resonance enhanced magnetoelectric coupling skin friction sensors shock tunnel experiment fast readout circuit bulk acoustic wave (BAW) magnetoelectric transducer antenna transmitter implantable medical devices (IMDs) resonance modes frequency modulation radiation power FEA resistive strain gauge gauge factor sensitive grids micro-morphology force sensor vibration sensor four-cantilever beam single-crystal LiNbO3 output charge sensitivity temperature dependence inertial switch threshold acceleration sensitive direction contact effect fabrication γ-GDY first-principles dope vacancy defect hydrogen storage property micro metal coil MEMS processing technology flexible electronic process magnetic film printing process n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation
Accés en línia:	ONIX_20240906_9783725815449_179
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Design and Fabrication of Micro/Nano Sensors and Actuators

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