Design and Fabrication of Micro/Nano Sensors and Actuators
With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano-sensors and micro/nano-actuators, have been developed and applied in various fields. These devices are mostly made of silicon, metals, ceramics, glass, etc., whose m...
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| Μορφή: | Online |
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| Γλώσσα: | Αγγλικά |
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MDPI - Multidisciplinary Digital Publishing Institute
2024
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| Διαθέσιμο Online: | ONIX_20240906_9783725815449_179 |
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| _version_ | 1869514562683797504 |
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| collection | Directory of Open Access Books |
| description | With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano-sensors and micro/nano-actuators, have been developed and applied in various fields. These devices are mostly made of silicon, metals, ceramics, glass, etc., whose mechanical and electrical properties have had a great influence on their working characteristics, including accuracy, sensitivity, and working range. In addition, the design and fabrication method can directly affect the reliability of these MEMS and NEMS devices, especially their lifetime, robustness, and stability under extreme conditions of shock, temperature, humidity, irradiation, chemical exposure, or other challenges. This Special Issue focuses on the structural design and optimization, system modeling and simulation, manufacturing, in situ characterization, and testing technologies of micro/nano-sensors and -actuators, providing research references for the further development and application of MEMS/NEMS devices. |
| format | Online |
| id | doab-20.500.12854ir-143817 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2024 |
| publishDateRange | 2024 |
| publishDateSort | 2024 |
| publisher | MDPI - Multidisciplinary Digital Publishing Institute |
| publisherStr | MDPI - Multidisciplinary Digital Publishing Institute |
| record_format | ojs |
| spelling | doab-20.500.12854ir-1438172024-09-06T08:31:50Z Design and Fabrication of Micro/Nano Sensors and Actuators Wang, Weidong Yang, Ruiguo resonant accelerometer temperature compensation difference stiction effect temporary handling SETH CMOS MEMS tactile sensor stiction-contact Au–Si eutectic flip-chip microneedle laser machining polylactic acid electrochemical detection biomolecules magnetic sensor bulk acoustic wave magnetic composite ME heterostructure resonance enhanced magnetoelectric coupling skin friction sensors shock tunnel experiment fast readout circuit bulk acoustic wave (BAW) magnetoelectric transducer antenna transmitter implantable medical devices (IMDs) resonance modes frequency modulation radiation power FEA resistive strain gauge gauge factor sensitive grids micro-morphology force sensor vibration sensor four-cantilever beam single-crystal LiNbO3 output charge sensitivity temperature dependence inertial switch threshold acceleration sensitive direction contact effect fabrication γ-GDY first-principles dope vacancy defect hydrogen storage property micro metal coil MEMS processing technology flexible electronic process magnetic film printing process n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation With the rapid development of materials science and manufacturing technology, numerous novel MEMS and NEMS devices, such as micro/nano-sensors and micro/nano-actuators, have been developed and applied in various fields. These devices are mostly made of silicon, metals, ceramics, glass, etc., whose mechanical and electrical properties have had a great influence on their working characteristics, including accuracy, sensitivity, and working range. In addition, the design and fabrication method can directly affect the reliability of these MEMS and NEMS devices, especially their lifetime, robustness, and stability under extreme conditions of shock, temperature, humidity, irradiation, chemical exposure, or other challenges. This Special Issue focuses on the structural design and optimization, system modeling and simulation, manufacturing, in situ characterization, and testing technologies of micro/nano-sensors and -actuators, providing research references for the further development and application of MEMS/NEMS devices. 2024-09-06T08:31:45Z 2024-09-06T08:31:45Z 2024 book ONIX_20240906_9783725815449_179 9783725815449 9783725815432 https://directory.doabooks.org/handle/20.500.12854/143817 eng application/octet-stream Attribution-NonCommercial-NoDerivatives 4.0 International https://mdpi.com/books/pdfview/book/9567 https://mdpi.com/books/pdfview/book/9567 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-7258-1543-2 10.3390/books978-3-7258-1543-2 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783725815449 9783725815432 open access |
| spellingShingle | resonant accelerometer temperature compensation difference stiction effect temporary handling SETH CMOS MEMS tactile sensor stiction-contact Au–Si eutectic flip-chip microneedle laser machining polylactic acid electrochemical detection biomolecules magnetic sensor bulk acoustic wave magnetic composite ME heterostructure resonance enhanced magnetoelectric coupling skin friction sensors shock tunnel experiment fast readout circuit bulk acoustic wave (BAW) magnetoelectric transducer antenna transmitter implantable medical devices (IMDs) resonance modes frequency modulation radiation power FEA resistive strain gauge gauge factor sensitive grids micro-morphology force sensor vibration sensor four-cantilever beam single-crystal LiNbO3 output charge sensitivity temperature dependence inertial switch threshold acceleration sensitive direction contact effect fabrication γ-GDY first-principles dope vacancy defect hydrogen storage property micro metal coil MEMS processing technology flexible electronic process magnetic film printing process n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation Design and Fabrication of Micro/Nano Sensors and Actuators |
| title | Design and Fabrication of Micro/Nano Sensors and Actuators |
| title_full | Design and Fabrication of Micro/Nano Sensors and Actuators |
| title_fullStr | Design and Fabrication of Micro/Nano Sensors and Actuators |
| title_full_unstemmed | Design and Fabrication of Micro/Nano Sensors and Actuators |
| title_short | Design and Fabrication of Micro/Nano Sensors and Actuators |
| title_sort | design and fabrication of micro nano sensors and actuators |
| topic | resonant accelerometer temperature compensation difference stiction effect temporary handling SETH CMOS MEMS tactile sensor stiction-contact Au–Si eutectic flip-chip microneedle laser machining polylactic acid electrochemical detection biomolecules magnetic sensor bulk acoustic wave magnetic composite ME heterostructure resonance enhanced magnetoelectric coupling skin friction sensors shock tunnel experiment fast readout circuit bulk acoustic wave (BAW) magnetoelectric transducer antenna transmitter implantable medical devices (IMDs) resonance modes frequency modulation radiation power FEA resistive strain gauge gauge factor sensitive grids micro-morphology force sensor vibration sensor four-cantilever beam single-crystal LiNbO3 output charge sensitivity temperature dependence inertial switch threshold acceleration sensitive direction contact effect fabrication γ-GDY first-principles dope vacancy defect hydrogen storage property micro metal coil MEMS processing technology flexible electronic process magnetic film printing process n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation |
| topic_facet | resonant accelerometer temperature compensation difference stiction effect temporary handling SETH CMOS MEMS tactile sensor stiction-contact Au–Si eutectic flip-chip microneedle laser machining polylactic acid electrochemical detection biomolecules magnetic sensor bulk acoustic wave magnetic composite ME heterostructure resonance enhanced magnetoelectric coupling skin friction sensors shock tunnel experiment fast readout circuit bulk acoustic wave (BAW) magnetoelectric transducer antenna transmitter implantable medical devices (IMDs) resonance modes frequency modulation radiation power FEA resistive strain gauge gauge factor sensitive grids micro-morphology force sensor vibration sensor four-cantilever beam single-crystal LiNbO3 output charge sensitivity temperature dependence inertial switch threshold acceleration sensitive direction contact effect fabrication γ-GDY first-principles dope vacancy defect hydrogen storage property micro metal coil MEMS processing technology flexible electronic process magnetic film printing process n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBM Instruments and instrumentation |
| url | ONIX_20240906_9783725815449_179 |