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Optical MEMS

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays,...

Deskribapen osoa

Gorde:
Egile Nagusiak: Zamkotsian, Frederic, Xie, Huikai
Formatua: Online
Hizkuntza:ingelesa
Argitaratua: MDPI - Multidisciplinary Digital Publishing Institute 2021
Gaiak:
TA1-2040
T1-995
stray light
input shaping
n/a
wavefront sensing
signal-to-noise ratio (SNR)
LC micro-lenses controlled electrically
infrared
intraoperative microscope
MEMS mirror
MLSSP
ocular aberrations
MEMS scanning micromirror
electrothermal actuation
electrothermal bimorph
open-loop control
wavelength dependent loss (WDL)
NIR fluorescence
infrared Fabry–Perot (FP) filtering
two-photon
resonant MEMS scanner
residual oscillation
3D measurement
parametric resonance
digital micromirror device
quality map
metalens
flame retardant 4 (FR4)
angle sensor
optical switch
metasurface
vibration noise
optical coherence tomography
spectrometer
reliability
quasistatic actuation
Huygens’ metalens
confocal
large reflection variations
electrostatic
dual-mode liquid-crystal (LC) device
field of view (FOV)
scanning micromirror
fluorescence confocal
variable optical attenuator (VOA)
micro-electro-mechanical systems (MEMS)
microscanner
laser stripe width
polarization dependent loss (PDL)
fringe projection
2D Lissajous
usable scan range
laser stripe scanning
bio-optical imaging
MEMS scanning mirror
digital micromirror device (DMD)
Cu/W bimorph
echelle grating
achromatic
DMD chip
tunable fiber laser
programmable spectral filter
higher-order modes
electromagnetic actuator
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
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