Optical MEMS
Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays,...
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| Main Authors: | , |
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| פורמט: | Online |
| שפה: | אנגלית |
| יצא לאור: |
MDPI - Multidisciplinary Digital Publishing Institute
2021
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| נושאים: | |
| גישה מקוונת: | 42468 |
| תגים: |
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| _version_ | 1869520526786953216 |
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| author | Zamkotsian, Frederic Xie, Huikai |
| author_browse | Xie, Huikai Zamkotsian, Frederic |
| author_facet | Zamkotsian, Frederic Xie, Huikai |
| author_sort | Zamkotsian, Frederic |
| collection | Directory of Open Access Books |
| description | Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense. |
| format | Online |
| id | doab-20.500.12854ir-55304 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | MDPI - Multidisciplinary Digital Publishing Institute |
| publisherStr | MDPI - Multidisciplinary Digital Publishing Institute |
| record_format | ojs |
| spelling | doab-20.500.12854ir-553042024-04-11T15:10:14Z Optical MEMS Zamkotsian, Frederic Xie, Huikai TA1-2040 T1-995 stray light input shaping n/a wavefront sensing signal-to-noise ratio (SNR) LC micro-lenses controlled electrically infrared intraoperative microscope MEMS mirror MLSSP ocular aberrations MEMS scanning micromirror electrothermal actuation electrothermal bimorph open-loop control wavelength dependent loss (WDL) NIR fluorescence infrared Fabry–Perot (FP) filtering two-photon resonant MEMS scanner residual oscillation 3D measurement parametric resonance digital micromirror device quality map metalens flame retardant 4 (FR4) angle sensor optical switch metasurface vibration noise optical coherence tomography spectrometer reliability quasistatic actuation Huygens’ metalens confocal large reflection variations electrostatic dual-mode liquid-crystal (LC) device field of view (FOV) scanning micromirror fluorescence confocal variable optical attenuator (VOA) micro-electro-mechanical systems (MEMS) microscanner laser stripe width polarization dependent loss (PDL) fringe projection 2D Lissajous usable scan range laser stripe scanning bio-optical imaging MEMS scanning mirror digital micromirror device (DMD) Cu/W bimorph echelle grating achromatic DMD chip tunable fiber laser programmable spectral filter higher-order modes electromagnetic actuator thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense. 2021-02-11T21:44:43Z 2021-02-11T21:44:43Z 2019-12-09 11:49:15 2019 book 42468 9783039213030 9783039213047 https://directory.doabooks.org/handle/20.500.12854/55304 eng application/octet-stream Attribution-NonCommercial-NoDerivatives 4.0 International https://mdpi.com/books/pdfview/book/1477 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-03921-304-7 10.3390/books978-3-03921-304-7 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783039213030 9783039213047 172 open access |
| spellingShingle | TA1-2040 T1-995 stray light input shaping n/a wavefront sensing signal-to-noise ratio (SNR) LC micro-lenses controlled electrically infrared intraoperative microscope MEMS mirror MLSSP ocular aberrations MEMS scanning micromirror electrothermal actuation electrothermal bimorph open-loop control wavelength dependent loss (WDL) NIR fluorescence infrared Fabry–Perot (FP) filtering two-photon resonant MEMS scanner residual oscillation 3D measurement parametric resonance digital micromirror device quality map metalens flame retardant 4 (FR4) angle sensor optical switch metasurface vibration noise optical coherence tomography spectrometer reliability quasistatic actuation Huygens’ metalens confocal large reflection variations electrostatic dual-mode liquid-crystal (LC) device field of view (FOV) scanning micromirror fluorescence confocal variable optical attenuator (VOA) micro-electro-mechanical systems (MEMS) microscanner laser stripe width polarization dependent loss (PDL) fringe projection 2D Lissajous usable scan range laser stripe scanning bio-optical imaging MEMS scanning mirror digital micromirror device (DMD) Cu/W bimorph echelle grating achromatic DMD chip tunable fiber laser programmable spectral filter higher-order modes electromagnetic actuator thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology Zamkotsian, Frederic Xie, Huikai Optical MEMS |
| title | Optical MEMS |
| title_full | Optical MEMS |
| title_fullStr | Optical MEMS |
| title_full_unstemmed | Optical MEMS |
| title_short | Optical MEMS |
| title_sort | optical mems |
| topic | TA1-2040 T1-995 stray light input shaping n/a wavefront sensing signal-to-noise ratio (SNR) LC micro-lenses controlled electrically infrared intraoperative microscope MEMS mirror MLSSP ocular aberrations MEMS scanning micromirror electrothermal actuation electrothermal bimorph open-loop control wavelength dependent loss (WDL) NIR fluorescence infrared Fabry–Perot (FP) filtering two-photon resonant MEMS scanner residual oscillation 3D measurement parametric resonance digital micromirror device quality map metalens flame retardant 4 (FR4) angle sensor optical switch metasurface vibration noise optical coherence tomography spectrometer reliability quasistatic actuation Huygens’ metalens confocal large reflection variations electrostatic dual-mode liquid-crystal (LC) device field of view (FOV) scanning micromirror fluorescence confocal variable optical attenuator (VOA) micro-electro-mechanical systems (MEMS) microscanner laser stripe width polarization dependent loss (PDL) fringe projection 2D Lissajous usable scan range laser stripe scanning bio-optical imaging MEMS scanning mirror digital micromirror device (DMD) Cu/W bimorph echelle grating achromatic DMD chip tunable fiber laser programmable spectral filter higher-order modes electromagnetic actuator thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology |
| topic_facet | TA1-2040 T1-995 stray light input shaping n/a wavefront sensing signal-to-noise ratio (SNR) LC micro-lenses controlled electrically infrared intraoperative microscope MEMS mirror MLSSP ocular aberrations MEMS scanning micromirror electrothermal actuation electrothermal bimorph open-loop control wavelength dependent loss (WDL) NIR fluorescence infrared Fabry–Perot (FP) filtering two-photon resonant MEMS scanner residual oscillation 3D measurement parametric resonance digital micromirror device quality map metalens flame retardant 4 (FR4) angle sensor optical switch metasurface vibration noise optical coherence tomography spectrometer reliability quasistatic actuation Huygens’ metalens confocal large reflection variations electrostatic dual-mode liquid-crystal (LC) device field of view (FOV) scanning micromirror fluorescence confocal variable optical attenuator (VOA) micro-electro-mechanical systems (MEMS) microscanner laser stripe width polarization dependent loss (PDL) fringe projection 2D Lissajous usable scan range laser stripe scanning bio-optical imaging MEMS scanning mirror digital micromirror device (DMD) Cu/W bimorph echelle grating achromatic DMD chip tunable fiber laser programmable spectral filter higher-order modes electromagnetic actuator thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology |
| url | 42468 |
| work_keys_str_mv | AT zamkotsianfrederic opticalmems AT xiehuikai opticalmems |