Advances in Unconventional Lithography

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse a...

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Format: Online
Idioma:anglès
Publicat: IntechOpen 2021
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Accés en línia:ONIX_20210420_9789533076072_642
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