Updates in Advanced Lithography
Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the so...
Kaydedildi:
| Materyal Türü: | Online |
|---|---|
| Dil: | İngilizce |
| Baskı/Yayın Bilgisi: |
IntechOpen
2021
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| Konular: | |
| Online Erişim: | ONIX_20210420_9789535111757_1937 |
| Etiketler: |
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