Updates in Advanced Lithography

Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the so...

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Detaylı Bibliyografya
Materyal Türü: Online
Dil:İngilizce
Baskı/Yayın Bilgisi: IntechOpen 2021
Konular:
Online Erişim:ONIX_20210420_9789535111757_1937
Etiketler: Etiketle
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