Updates in Advanced Lithography
Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the so...
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| Médium: | Online |
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| Jazyk: | angličtina |
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IntechOpen
2021
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| Témata: | |
| On-line přístup: | ONIX_20210420_9789535111757_1937 |
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| _version_ | 1869520746515005440 |
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| collection | Directory of Open Access Books |
| description | Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications. |
| format | Online |
| id | doab-20.500.12854ir-66578 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-665782024-04-05T12:38:48Z Updates in Advanced Lithography Hosaka, Sumio Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications. 2021-04-20T15:47:17Z 2021-04-20T15:47:17Z 2013 book ONIX_20210420_9789535111757_1937 9789535111757 9789535157090 https://directory.doabooks.org/handle/20.500.12854/66578 eng image/jpeg n/a https://www.intechopen.com/books https://mts.intechopen.com/storage/books/3071/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/3348 10.5772/3348 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789535111757 9789535157090 IntechOpen 262 open access |
| spellingShingle | Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) Updates in Advanced Lithography |
| title | Updates in Advanced Lithography |
| title_full | Updates in Advanced Lithography |
| title_fullStr | Updates in Advanced Lithography |
| title_full_unstemmed | Updates in Advanced Lithography |
| title_short | Updates in Advanced Lithography |
| title_sort | updates in advanced lithography |
| topic | Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) |
| topic_facet | Condensed matter physics (liquid state & solid state physics) thema EDItEUR::P Mathematics and Science::PH Physics::PHF Materials / States of matter::PHFC Condensed matter physics (liquid state and solid state physics) |
| url | ONIX_20210420_9789535111757_1937 |