Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...
Saved in:
| Main Author: | |
|---|---|
| Format: | Online |
| Language: | German |
| Published: |
KIT Scientific Publishing
2022
|
| Subjects: | |
| Online Access: | ONIX_20220404_9783731511212_6 |
| Tags: |
No Tags, Be the first to tag this record!
|
| _version_ | 1869516579004219392 |
|---|---|
| author | Kopf, Marlene |
| author_browse | Kopf, Marlene |
| author_facet | Kopf, Marlene |
| author_sort | Kopf, Marlene |
| collection | Directory of Open Access Books |
| description | Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack. |
| format | Online |
| id | doab-20.500.12854ir-80561 |
| institution | Directory of Open Access Books |
| language | ger |
| publishDate | 2022 |
| publishDateRange | 2022 |
| publishDateSort | 2022 |
| publisher | KIT Scientific Publishing |
| publisherStr | KIT Scientific Publishing |
| record_format | ojs |
| spelling | doab-20.500.12854ir-805612025-07-30T11:55:22Z Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis Kopf, Marlene MEMS-Sensor Drehratensensor Inertialsensor Dämpfung Q-Faktor MEMS sensor gyroscope inertial sensor damping atmosphere Q factor thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack. 2022-04-05T04:01:23Z 2022-04-05T04:01:23Z 2022-04-04T14:53:17Z 2022 book ONIX_20220404_9783731511212_6 OCN: 1346810697 1869-5183 https://library.oapen.org/handle/20.500.12657/53694 9783731511212 https://directory.doabooks.org/handle/20.500.12854/80561 ger Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie open access image/jpeg image/jpeg image/jpeg image/jpeg n/a n/a n/a n/a https://library.oapen.org/bitstream/20.500.12657/53694/1/9783731511212.pdf https://library.oapen.org/bitstream/20.500.12657/53694/1/9783731511212.pdf https://library.oapen.org/bitstream/20.500.12657/53694/1/9783731511212.pdf https://library.oapen.org/bitstream/20.500.12657/53694/1/9783731511212.pdf KIT Scientific Publishing KIT Scientific Publishing 10.5445/KSP/1000136062 10.5445/KSP/1000136062 68fffc18-8f7b-44fa-ac7e-0b7d7d979bd2 9783731511212 AG Universitätsverlage KIT Scientific Publishing 220 Karlsruhe open access |
| spellingShingle | MEMS-Sensor Drehratensensor Inertialsensor Dämpfung Q-Faktor MEMS sensor gyroscope inertial sensor damping atmosphere Q factor thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials Kopf, Marlene Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
| title | Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
| title_full | Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
| title_fullStr | Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
| title_full_unstemmed | Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
| title_short | Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
| title_sort | langzeitstabilitat der innendrucke von kavernen benachbarter mems sensoren auf siliziumbasis |
| topic | MEMS-Sensor Drehratensensor Inertialsensor Dämpfung Q-Faktor MEMS sensor gyroscope inertial sensor damping atmosphere Q factor thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials |
| topic_facet | MEMS-Sensor Drehratensensor Inertialsensor Dämpfung Q-Faktor MEMS sensor gyroscope inertial sensor damping atmosphere Q factor thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials |
| url | ONIX_20220404_9783731511212_6 |
| work_keys_str_mv | AT kopfmarlene langzeitstabilitatderinnendruckevonkavernenbenachbartermemssensorenaufsiliziumbasis |