Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...

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Bibliographic Details

Main Author:	Kopf, Marlene
Format:	Online
Language:	German
Published:	KIT Scientific Publishing 2022
Subjects:	MEMS-Sensor Drehratensensor Inertialsensor Dämpfung Q-Faktor MEMS sensor gyroscope inertial sensor damping atmosphere Q factor thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials
Online Access:	ONIX_20220404_9783731511212_6
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