Ion Implantation

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new material...

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Détails bibliographiques
Format: Online
Langue:anglais
Publié: IntechOpen 2023
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Accès en ligne:ONIX_20231201_9789535106340_294
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