Ion Implantation
Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new material...
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| Format: | Online |
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| Langue: | anglais |
| Publié: |
IntechOpen
2023
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| Sujets: | |
| Accès en ligne: | ONIX_20231201_9789535106340_294 |
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