Ion Implantation
Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new material...
Պահպանված է:
| Ձևաչափ: | Online |
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| Լեզու: | անգլերեն |
| Հրապարակվել է: |
IntechOpen
2023
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| Խորագրեր: | |
| Առցանց հասանելիություն: | ONIX_20231201_9789535106340_294 |
| Ցուցիչներ: |
Չկան պիտակներ, Եղեք առաջինը, ով նշում է այս գրառումը!
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| _version_ | 1869528983497867264 |
|---|---|
| collection | Directory of Open Access Books |
| description | Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book. |
| format | Online |
| id | doab-20.500.12854ir-129186 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2023 |
| publishDateRange | 2023 |
| publishDateSort | 2023 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-1291862024-04-11T20:34:50Z Ion Implantation Goorsky, Mark Materials science thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book. 2023-12-01T14:59:17Z 2023-12-01T14:59:17Z 2012 book ONIX_20231201_9789535106340_294 9789535106340 9789535142928 https://directory.doabooks.org/handle/20.500.12854/129186 eng image/jpeg n/a https://www.intechopen.com/books/1421 https://mts.intechopen.com/storage/books/1421/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/1881 10.5772/1881 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789535106340 9789535142928 IntechOpen 450 open access |
| spellingShingle | Materials science thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics Ion Implantation |
| title | Ion Implantation |
| title_full | Ion Implantation |
| title_fullStr | Ion Implantation |
| title_full_unstemmed | Ion Implantation |
| title_short | Ion Implantation |
| title_sort | ion implantation |
| topic | Materials science thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics |
| topic_facet | Materials science thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials::TGM Materials science::TGMB Engineering thermodynamics |
| url | ONIX_20231201_9789535106340_294 |