Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...
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| Autor principal: | |
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| Format: | Online |
| Idioma: | alemany |
| Publicat: |
KIT Scientific Publishing
2021
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| Matèries: | |
| Accés en línia: | 35638 |
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