Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung

In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...

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Bibliografiske detaljer

Hovedforfatter:	Waldbaur, Ansgar
Format:	Online
Sprog:	tysk
Udgivet:	KIT Scientific Publishing 2021
Fag:	T1-995 Mikrofluidikchip Rapid Prototyping Mikrospiegelarray Ligandenmuster Lithographie thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
Online adgang:	35638
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