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Gas Flows in Microsystems

The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in f...

Täydet tiedot

Tallennettuna:
Päätekijät: Baldas, Lucien, Colin, Stéphane
Aineistotyyppi: Online
Kieli:englanti
Julkaistu: MDPI - Multidisciplinary Digital Publishing Institute 2021
Aiheet:
T1-995
preconcentrator
UV absorption
n/a
bearing characteristics
ultraviolet light-emitting diode (UV LED)
resonant micro-electromechanical-systems (MEMS)
heat sinks
measurement and control
flow choking
mixing length
gas flows in micro scale
BTEX
kinetic theory
PID detector
ethylbenzene and xylene (BTEX)
computational fluid dynamics (CFD)
OpenFOAM
direct simulation Monte Carlo (DSMC)
thermally induced flow
vacuum micropump
miniaturization
gaseous rarefaction effects
modelling
volatile organic compound (VOC) detection
supersonic microjets
slip flow
Nano-Electro-Mechanical Systems (NEMS)
micro-mirrors
micro-scale flows
microfabrication
Knudsen pump
microfluidic
microfluidics
hollow core waveguides
capillary tubes
gas mixing
advanced measurement technologies
DSMC
Micro-Electro-Mechanical Systems (MEMS)
microchannels
miniaturized gas chromatograph
Pitot tube
multi-stage micromixer
analytical solution
pressure drop
micro-mixer
thermal transpiration
photoionization detector
FE analysis
gas mixtures
spectrophotometry
Knudsen layer
pulsed flow
Fanno flow
integrated micro sensors
binary gas mixing
modified Reynolds equation
rarefied gas flow
rarefied gas flows
backward facing step
modular micromixer
fractal surface topography
underexpansion
electronic cooling
splitter
compressibility
photolithography
Benzene
out-of-plane comb actuation
gas sensors
aerodynamic effect
fluid damping
toluene
control mixture composition
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
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