Gas Flows in Microsystems

The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in f...

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Bibliografiske detaljer
Main Authors:	Baldas, Lucien, Colin, Stéphane
Format:	Online
Sprog:	engelsk
Udgivet:	MDPI - Multidisciplinary Digital Publishing Institute 2021
Fag:	T1-995 preconcentrator UV absorption n/a bearing characteristics ultraviolet light-emitting diode (UV LED) resonant micro-electromechanical-systems (MEMS) heat sinks measurement and control flow choking mixing length gas flows in micro scale BTEX kinetic theory PID detector ethylbenzene and xylene (BTEX) computational fluid dynamics (CFD) OpenFOAM direct simulation Monte Carlo (DSMC) thermally induced flow vacuum micropump miniaturization gaseous rarefaction effects modelling volatile organic compound (VOC) detection supersonic microjets slip flow Nano-Electro-Mechanical Systems (NEMS) micro-mirrors micro-scale flows microfabrication Knudsen pump microfluidic microfluidics hollow core waveguides capillary tubes gas mixing advanced measurement technologies DSMC Micro-Electro-Mechanical Systems (MEMS) microchannels miniaturized gas chromatograph Pitot tube multi-stage micromixer analytical solution pressure drop micro-mixer thermal transpiration photoionization detector FE analysis gas mixtures spectrophotometry Knudsen layer pulsed flow Fanno flow integrated micro sensors binary gas mixing modified Reynolds equation rarefied gas flow rarefied gas flows backward facing step modular micromixer fractal surface topography underexpansion electronic cooling splitter compressibility photolithography Benzene out-of-plane comb actuation gas sensors aerodynamic effect fluid damping toluene control mixture composition thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
Online adgang:	42606
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Gas Flows in Microsystems

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