Gas Flows in Microsystems

The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in f...

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Auteurs principaux: Baldas, Lucien, Colin, Stéphane
Format: Online
Langue:anglais
Publié: MDPI - Multidisciplinary Digital Publishing Institute 2021
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Accès en ligne:42606
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author Baldas, Lucien
Colin, Stéphane
author_browse Baldas, Lucien
Colin, Stéphane
author_facet Baldas, Lucien
Colin, Stéphane
author_sort Baldas, Lucien
collection Directory of Open Access Books
description The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in fluidic microactuators developed for active flow control purposes, in micronozzles used for the micropropulsion of nano and picosats, in microgas chromatographs, analyzers or separators, in vacuum generators and in Knudsen micropumps, as well as in some organs-on-a-chip, such as artificial lungs. These flows are rarefied due to the small MEMS dimensions, and the rarefaction can be increased by low-pressure conditions. The flows relate to the slip flow, transition or free molecular regimes and can involve monatomic or polyatomic gases and gas mixtures. Hydrodynamics and heat and mass transfer are strongly impacted by rarefaction effects, and temperature-driven microflows offer new opportunities for designing original MEMS for gas pumping or separation. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel theoretical and numerical models or data, as well as on new experimental results and technics, for improving knowledge on heat and mass transfer in gas microflows. Papers dealing with the development of original gas MEMS are also welcome.
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spelling doab-20.500.12854ir-482892024-04-09T23:15:33Z Gas Flows in Microsystems Baldas, Lucien Colin, Stéphane T1-995 preconcentrator UV absorption n/a bearing characteristics ultraviolet light-emitting diode (UV LED) resonant micro-electromechanical-systems (MEMS) heat sinks measurement and control flow choking mixing length gas flows in micro scale BTEX kinetic theory PID detector ethylbenzene and xylene (BTEX) computational fluid dynamics (CFD) OpenFOAM direct simulation Monte Carlo (DSMC) thermally induced flow vacuum micropump miniaturization gaseous rarefaction effects modelling volatile organic compound (VOC) detection supersonic microjets slip flow Nano-Electro-Mechanical Systems (NEMS) micro-mirrors micro-scale flows microfabrication Knudsen pump microfluidic microfluidics hollow core waveguides capillary tubes gas mixing advanced measurement technologies DSMC Micro-Electro-Mechanical Systems (MEMS) microchannels miniaturized gas chromatograph Pitot tube multi-stage micromixer analytical solution pressure drop micro-mixer thermal transpiration photoionization detector FE analysis gas mixtures spectrophotometry Knudsen layer pulsed flow Fanno flow integrated micro sensors binary gas mixing modified Reynolds equation rarefied gas flow rarefied gas flows backward facing step modular micromixer fractal surface topography underexpansion electronic cooling splitter compressibility photolithography Benzene out-of-plane comb actuation gas sensors aerodynamic effect fluid damping toluene control mixture composition thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in fluidic microactuators developed for active flow control purposes, in micronozzles used for the micropropulsion of nano and picosats, in microgas chromatographs, analyzers or separators, in vacuum generators and in Knudsen micropumps, as well as in some organs-on-a-chip, such as artificial lungs. These flows are rarefied due to the small MEMS dimensions, and the rarefaction can be increased by low-pressure conditions. The flows relate to the slip flow, transition or free molecular regimes and can involve monatomic or polyatomic gases and gas mixtures. Hydrodynamics and heat and mass transfer are strongly impacted by rarefaction effects, and temperature-driven microflows offer new opportunities for designing original MEMS for gas pumping or separation. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel theoretical and numerical models or data, as well as on new experimental results and technics, for improving knowledge on heat and mass transfer in gas microflows. Papers dealing with the development of original gas MEMS are also welcome. 2021-02-11T14:17:00Z 2021-02-11T14:17:00Z 2019-12-09 11:49:16 2019 book 42606 9783039215430 9783039215423 https://directory.doabooks.org/handle/20.500.12854/48289 eng application/octet-stream Attribution-NonCommercial-NoDerivatives 4.0 International https://mdpi.com/books/pdfview/book/1748 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-03921-543-0 10.3390/books978-3-03921-543-0 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783039215430 9783039215423 220 open access
spellingShingle T1-995
preconcentrator
UV absorption
n/a
bearing characteristics
ultraviolet light-emitting diode (UV LED)
resonant micro-electromechanical-systems (MEMS)
heat sinks
measurement and control
flow choking
mixing length
gas flows in micro scale
BTEX
kinetic theory
PID detector
ethylbenzene and xylene (BTEX)
computational fluid dynamics (CFD)
OpenFOAM
direct simulation Monte Carlo (DSMC)
thermally induced flow
vacuum micropump
miniaturization
gaseous rarefaction effects
modelling
volatile organic compound (VOC) detection
supersonic microjets
slip flow
Nano-Electro-Mechanical Systems (NEMS)
micro-mirrors
micro-scale flows
microfabrication
Knudsen pump
microfluidic
microfluidics
hollow core waveguides
capillary tubes
gas mixing
advanced measurement technologies
DSMC
Micro-Electro-Mechanical Systems (MEMS)
microchannels
miniaturized gas chromatograph
Pitot tube
multi-stage micromixer
analytical solution
pressure drop
micro-mixer
thermal transpiration
photoionization detector
FE analysis
gas mixtures
spectrophotometry
Knudsen layer
pulsed flow
Fanno flow
integrated micro sensors
binary gas mixing
modified Reynolds equation
rarefied gas flow
rarefied gas flows
backward facing step
modular micromixer
fractal surface topography
underexpansion
electronic cooling
splitter
compressibility
photolithography
Benzene
out-of-plane comb actuation
gas sensors
aerodynamic effect
fluid damping
toluene
control mixture composition
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
Baldas, Lucien
Colin, Stéphane
Gas Flows in Microsystems
title Gas Flows in Microsystems
title_full Gas Flows in Microsystems
title_fullStr Gas Flows in Microsystems
title_full_unstemmed Gas Flows in Microsystems
title_short Gas Flows in Microsystems
title_sort gas flows in microsystems
topic T1-995
preconcentrator
UV absorption
n/a
bearing characteristics
ultraviolet light-emitting diode (UV LED)
resonant micro-electromechanical-systems (MEMS)
heat sinks
measurement and control
flow choking
mixing length
gas flows in micro scale
BTEX
kinetic theory
PID detector
ethylbenzene and xylene (BTEX)
computational fluid dynamics (CFD)
OpenFOAM
direct simulation Monte Carlo (DSMC)
thermally induced flow
vacuum micropump
miniaturization
gaseous rarefaction effects
modelling
volatile organic compound (VOC) detection
supersonic microjets
slip flow
Nano-Electro-Mechanical Systems (NEMS)
micro-mirrors
micro-scale flows
microfabrication
Knudsen pump
microfluidic
microfluidics
hollow core waveguides
capillary tubes
gas mixing
advanced measurement technologies
DSMC
Micro-Electro-Mechanical Systems (MEMS)
microchannels
miniaturized gas chromatograph
Pitot tube
multi-stage micromixer
analytical solution
pressure drop
micro-mixer
thermal transpiration
photoionization detector
FE analysis
gas mixtures
spectrophotometry
Knudsen layer
pulsed flow
Fanno flow
integrated micro sensors
binary gas mixing
modified Reynolds equation
rarefied gas flow
rarefied gas flows
backward facing step
modular micromixer
fractal surface topography
underexpansion
electronic cooling
splitter
compressibility
photolithography
Benzene
out-of-plane comb actuation
gas sensors
aerodynamic effect
fluid damping
toluene
control mixture composition
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
topic_facet T1-995
preconcentrator
UV absorption
n/a
bearing characteristics
ultraviolet light-emitting diode (UV LED)
resonant micro-electromechanical-systems (MEMS)
heat sinks
measurement and control
flow choking
mixing length
gas flows in micro scale
BTEX
kinetic theory
PID detector
ethylbenzene and xylene (BTEX)
computational fluid dynamics (CFD)
OpenFOAM
direct simulation Monte Carlo (DSMC)
thermally induced flow
vacuum micropump
miniaturization
gaseous rarefaction effects
modelling
volatile organic compound (VOC) detection
supersonic microjets
slip flow
Nano-Electro-Mechanical Systems (NEMS)
micro-mirrors
micro-scale flows
microfabrication
Knudsen pump
microfluidic
microfluidics
hollow core waveguides
capillary tubes
gas mixing
advanced measurement technologies
DSMC
Micro-Electro-Mechanical Systems (MEMS)
microchannels
miniaturized gas chromatograph
Pitot tube
multi-stage micromixer
analytical solution
pressure drop
micro-mixer
thermal transpiration
photoionization detector
FE analysis
gas mixtures
spectrophotometry
Knudsen layer
pulsed flow
Fanno flow
integrated micro sensors
binary gas mixing
modified Reynolds equation
rarefied gas flow
rarefied gas flows
backward facing step
modular micromixer
fractal surface topography
underexpansion
electronic cooling
splitter
compressibility
photolithography
Benzene
out-of-plane comb actuation
gas sensors
aerodynamic effect
fluid damping
toluene
control mixture composition
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
url 42606
work_keys_str_mv AT baldaslucien gasflowsinmicrosystems
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