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RF Probe-Induced On-Wafer Measurement Errors in the Millimeter-Wave Frequency Range

Measurement at millimeter-wave frequencies are prone to parasitic effects which distort the overall results. Especially the use of RF probes introduces unknown distortions, even after the measurement setup is calibrated. This works investigates these distortions based on electromagnetic field simula...

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Guardat en:
Autor principal: Müller, Daniel
Format: Online
Idioma:anglès
Publicat: KIT Scientific Publishing 2021
Matèries:
T1-995
On-Wafer Measurements
Monolithic Microwave Integrated Circuits
Halbleiterschaltungen
Messtechnik
Hochfrequenztechnik
Electromagnetic Field Simulation
Elektromagnetische Feldsimulation
Radio Frequency
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
Accés en línia:34153
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Sumari:Measurement at millimeter-wave frequencies are prone to parasitic effects which distort the overall results. Especially the use of RF probes introduces unknown distortions, even after the measurement setup is calibrated. This works investigates these distortions based on electromagnetic field simulations of integrated circuits in conjunction with models of the used RF probes. This allows to comprehend the observed distortions and successfully resolve the root of the distortions.

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