X-ray optics made by X-ray lithography: Process optimization and quality control

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structu...

Celý popis

Uloženo v:
Podrobná bibliografie
Hlavní autor: Koch, Frieder Johannes
Médium: Online
Jazyk:angličtina
Vydáno: KIT Scientific Publishing 2021
Témata:
On-line přístup:34602
Tagy: Přidat tag
Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!
Popis
Shrnutí:Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.