X-ray optics made by X-ray lithography: Process optimization and quality control
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structu...
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| Hlavní autor: | |
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| Médium: | Online |
| Jazyk: | angličtina |
| Vydáno: |
KIT Scientific Publishing
2021
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| Témata: | |
| On-line přístup: | 34602 |
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| Shrnutí: | Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work. |
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