X-ray optics made by X-ray lithography: Process optimization and quality control
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structu...
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| Materialtyp: | Online |
| Språk: | engelska |
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KIT Scientific Publishing
2021
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| Länkar: | 34602 |
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| _version_ | 1869523797092073472 |
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| author | Koch, Frieder Johannes |
| author_browse | Koch, Frieder Johannes |
| author_facet | Koch, Frieder Johannes |
| author_sort | Koch, Frieder Johannes |
| collection | Directory of Open Access Books |
| description | Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work. |
| format | Online |
| id | doab-20.500.12854ir-62856 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | KIT Scientific Publishing |
| publisherStr | KIT Scientific Publishing |
| record_format | ojs |
| spelling | doab-20.500.12854ir-628562024-04-09T23:15:21Z X-ray optics made by X-ray lithography: Process optimization and quality control Koch, Frieder Johannes T1-995 Talbot effect Röntgengitter LIGA X-ray optics Phasenkontrast Talbot-Effect phase contrast X-ray gratings Röntgenoptik thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work. 2021-02-12T08:51:07Z 2021-02-12T08:51:07Z 2019-07-30 20:01:58 2017 book 34602 18695183 9783731506799 https://directory.doabooks.org/handle/20.500.12854/62856 eng Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik image/jpeg Attribution-ShareAlike 4.0 International https://www.ksp.kit.edu/9783731506799 KIT Scientific Publishing 10.5445/KSP/1000070029 10.5445/KSP/1000070029 68fffc18-8f7b-44fa-ac7e-0b7d7d979bd2 9783731506799 X, 138 p. open access |
| spellingShingle | T1-995 Talbot effect Röntgengitter LIGA X-ray optics Phasenkontrast Talbot-Effect phase contrast X-ray gratings Röntgenoptik thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues Koch, Frieder Johannes X-ray optics made by X-ray lithography: Process optimization and quality control |
| title | X-ray optics made by X-ray lithography: Process optimization and quality control |
| title_full | X-ray optics made by X-ray lithography: Process optimization and quality control |
| title_fullStr | X-ray optics made by X-ray lithography: Process optimization and quality control |
| title_full_unstemmed | X-ray optics made by X-ray lithography: Process optimization and quality control |
| title_short | X-ray optics made by X-ray lithography: Process optimization and quality control |
| title_sort | x ray optics made by x ray lithography process optimization and quality control |
| topic | T1-995 Talbot effect Röntgengitter LIGA X-ray optics Phasenkontrast Talbot-Effect phase contrast X-ray gratings Röntgenoptik thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues |
| topic_facet | T1-995 Talbot effect Röntgengitter LIGA X-ray optics Phasenkontrast Talbot-Effect phase contrast X-ray gratings Röntgenoptik thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues |
| url | 34602 |
| work_keys_str_mv | AT kochfriederjohannes xrayopticsmadebyxraylithographyprocessoptimizationandqualitycontrol |