Micromachining Techniques for Fabrication of Micro and Nano Structures
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
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| Format: | Online |
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| Language: | English |
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IntechOpen
2021
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| Online Access: | ONIX_20210420_9789533079066_873 |
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| collection | Directory of Open Access Books |
| description | Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry. |
| format | Online |
| id | doab-20.500.12854ir-65516 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-655162024-04-05T12:38:47Z Micromachining Techniques for Fabrication of Micro and Nano Structures Kahrizi, Mojtaba Analytical chemistry thema EDItEUR::P Mathematics and Science::PN Chemistry Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry. 2021-04-20T15:19:10Z 2021-04-20T15:19:10Z 2012 book ONIX_20210420_9789533079066_873 9789533079066 9789535160953 https://directory.doabooks.org/handle/20.500.12854/65516 eng image/jpeg n/a https://www.intechopen.com/books https://mts.intechopen.com/storage/books/854/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/1364 10.5772/1364 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789533079066 9789535160953 IntechOpen 314 open access |
| spellingShingle | Analytical chemistry thema EDItEUR::P Mathematics and Science::PN Chemistry Micromachining Techniques for Fabrication of Micro and Nano Structures |
| title | Micromachining Techniques for Fabrication of Micro and Nano Structures |
| title_full | Micromachining Techniques for Fabrication of Micro and Nano Structures |
| title_fullStr | Micromachining Techniques for Fabrication of Micro and Nano Structures |
| title_full_unstemmed | Micromachining Techniques for Fabrication of Micro and Nano Structures |
| title_short | Micromachining Techniques for Fabrication of Micro and Nano Structures |
| title_sort | micromachining techniques for fabrication of micro and nano structures |
| topic | Analytical chemistry thema EDItEUR::P Mathematics and Science::PN Chemistry |
| topic_facet | Analytical chemistry thema EDItEUR::P Mathematics and Science::PN Chemistry |
| url | ONIX_20210420_9789533079066_873 |