Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...

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Bibliographic Details

Format:	Online
Language:	English
Published:	IntechOpen 2021
Subjects:	Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics
Online Access:	ONIX_20210420_9789535110859_1900
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