Microelectromechanical Systems and Devices

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...

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Bibliografske podrobnosti
Format: Online
Jezik:angleščina
Izdano: IntechOpen 2021
Teme:
Online dostop:ONIX_20210420_9789535103066_1260
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