Microelectromechanical Systems and Devices
The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...
Պահպանված է:
| Ձևաչափ: | Online |
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| Լեզու: | անգլերեն |
| Հրապարակվել է: |
IntechOpen
2021
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| Խորագրեր: | |
| Առցանց հասանելիություն: | ONIX_20210420_9789535103066_1260 |
| Ցուցիչներ: |
Չկան պիտակներ, Եղեք առաջինը, ով նշում է այս գրառումը!
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| _version_ | 1869522564480499712 |
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| collection | Directory of Open Access Books |
| description | The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators. |
| format | Online |
| id | doab-20.500.12854ir-65902 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-659022024-04-05T12:36:35Z Microelectromechanical Systems and Devices Islam, Nazmul Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators. 2021-04-20T15:28:53Z 2021-04-20T15:28:53Z 2012 book ONIX_20210420_9789535103066_1260 9789535103066 9789535161783 https://directory.doabooks.org/handle/20.500.12854/65902 eng image/jpeg n/a https://www.intechopen.com/books https://mts.intechopen.com/storage/books/853/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/1363 10.5772/1363 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789535103066 9789535161783 IntechOpen 494 open access |
| spellingShingle | Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics Microelectromechanical Systems and Devices |
| title | Microelectromechanical Systems and Devices |
| title_full | Microelectromechanical Systems and Devices |
| title_fullStr | Microelectromechanical Systems and Devices |
| title_full_unstemmed | Microelectromechanical Systems and Devices |
| title_short | Microelectromechanical Systems and Devices |
| title_sort | microelectromechanical systems and devices |
| topic | Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics |
| topic_facet | Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics |
| url | ONIX_20210420_9789535103066_1260 |