Microelectromechanical Systems and Devices

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...

Ausführliche Beschreibung

Bibliographische Detailangaben

Format:	Online
Sprache:	Englisch
Veröffentlicht:	IntechOpen 2021
Schlagworte:	Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics
Online-Zugang:	ONIX_20210420_9789535103066_1260
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