Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...
Guardat en:
| Format: | Online |
|---|---|
| Idioma: | anglès |
| Publicat: |
IntechOpen
2021
|
| Matèries: | |
| Accés en línia: | ONIX_20210420_9789535110859_1900 |
| Etiquetes: |
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|
| _version_ | 1869523095798153216 |
|---|---|
| collection | Directory of Open Access Books |
| description | MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials. |
| format | Online |
| id | doab-20.500.12854ir-66541 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-665412024-04-05T12:36:36Z Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Takahata, Kenichi Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials. 2021-04-20T15:46:19Z 2021-04-20T15:46:19Z 2013 book ONIX_20210420_9789535110859_1900 9789535110859 9789535163442 https://directory.doabooks.org/handle/20.500.12854/66541 eng image/jpeg n/a https://www.intechopen.com/books https://mts.intechopen.com/storage/books/3332/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/46117 10.5772/46117 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789535110859 9789535163442 IntechOpen 236 open access |
| spellingShingle | Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
| title | Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
| title_full | Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
| title_fullStr | Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
| title_full_unstemmed | Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
| title_short | Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies |
| title_sort | advances in micro nano electromechanical systems and fabrication technologies |
| topic | Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics |
| topic_facet | Electricity, electromagnetism & magnetism thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics |
| url | ONIX_20210420_9789535110859_1900 |