Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a...

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Autore principale:	Taudt, Christopher
Natura:	Online
Lingua:	inglese
Pubblicazione:	Springer Nature 2021
Soggetti:	surface metrology profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc
Accesso online:	ONIX_20211213_9783658359263_14
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