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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a...

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Sparad:
Huvudupphov: Taudt, Christopher
Materialtyp: Online
Språk:engelska
Utgiven: Springer Nature 2021
Ämnen:
surface metrology
profilometry
interferometry
low-coherence interferometry
semiconductor manufacturing
optical metrology
Open Access
thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics
thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc
Länkar:ONIX_20211213_9783658359263_14
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